Magnetic field influence on silicon surface periodic structures obtained by plasma flow action
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2006
Authors
Dojčinović, I.P.Kuraica, Milorad M.

Mitrovi, Ć M.
Randjelović, Danijela

Matić, M.
Puri, Ć J.
Conference object (Published version)

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External magnetic field influence on silicon submicron surface periodic structures obtained by the action of nitrogen supersonic quasistationary compression plasma flow (CPF) is studied. CPF is generated by magnetoplasma compressor. It was found that, without external magnetic field, highly-oriented silicon periodic cylindrical shape structures are produced during single pulse surface treatment. Silicon periodic structures were modified by external constant magnetic field. Hexagonal structures of the side length about 500 nm and height of the order of 10 nm, are obtained. Morphology investigation was made by SEM and AFM microscopy.
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25th International Conference on Microelectronics, MIEL 2006 - Proceedings, 2006, 149-152Collections
Institution/Community
IHTMTY - CONF AU - Dojčinović, I.P. AU - Kuraica, Milorad M. AU - Mitrovi, Ć M. AU - Randjelović, Danijela AU - Matić, M. AU - Puri, Ć J. PY - 2006 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/277 AB - External magnetic field influence on silicon submicron surface periodic structures obtained by the action of nitrogen supersonic quasistationary compression plasma flow (CPF) is studied. CPF is generated by magnetoplasma compressor. It was found that, without external magnetic field, highly-oriented silicon periodic cylindrical shape structures are produced during single pulse surface treatment. Silicon periodic structures were modified by external constant magnetic field. Hexagonal structures of the side length about 500 nm and height of the order of 10 nm, are obtained. Morphology investigation was made by SEM and AFM microscopy. C3 - 25th International Conference on Microelectronics, MIEL 2006 - Proceedings T1 - Magnetic field influence on silicon surface periodic structures obtained by plasma flow action SP - 149 EP - 152 DO - 10.1109/ICMEL.2006.1650916 ER -
@conference{ author = "Dojčinović, I.P. and Kuraica, Milorad M. and Mitrovi, Ć M. and Randjelović, Danijela and Matić, M. and Puri, Ć J.", year = "2006", abstract = "External magnetic field influence on silicon submicron surface periodic structures obtained by the action of nitrogen supersonic quasistationary compression plasma flow (CPF) is studied. CPF is generated by magnetoplasma compressor. It was found that, without external magnetic field, highly-oriented silicon periodic cylindrical shape structures are produced during single pulse surface treatment. Silicon periodic structures were modified by external constant magnetic field. Hexagonal structures of the side length about 500 nm and height of the order of 10 nm, are obtained. Morphology investigation was made by SEM and AFM microscopy.", journal = "25th International Conference on Microelectronics, MIEL 2006 - Proceedings", title = "Magnetic field influence on silicon surface periodic structures obtained by plasma flow action", pages = "149-152", doi = "10.1109/ICMEL.2006.1650916" }
Dojčinović, I.P., Kuraica, M. M., Mitrovi, Ć. M., Randjelović, D., Matić, M.,& Puri, Ć. J.. (2006). Magnetic field influence on silicon surface periodic structures obtained by plasma flow action. in 25th International Conference on Microelectronics, MIEL 2006 - Proceedings, 149-152. https://doi.org/10.1109/ICMEL.2006.1650916
Dojčinović I, Kuraica MM, Mitrovi ĆM, Randjelović D, Matić M, Puri ĆJ. Magnetic field influence on silicon surface periodic structures obtained by plasma flow action. in 25th International Conference on Microelectronics, MIEL 2006 - Proceedings. 2006;:149-152. doi:10.1109/ICMEL.2006.1650916 .
Dojčinović, I.P., Kuraica, Milorad M., Mitrovi, Ć M., Randjelović, Danijela, Matić, M., Puri, Ć J., "Magnetic field influence on silicon surface periodic structures obtained by plasma flow action" in 25th International Conference on Microelectronics, MIEL 2006 - Proceedings (2006):149-152, https://doi.org/10.1109/ICMEL.2006.1650916 . .