External magnetic field influence on silicon submicron surface periodic structures obtained by the action of nitrogen supersonic quasistationary compression plasma flow (CPF) is studied. CPF is generated by magnetoplasma compressor. It was found that, without external magnetic field, highly-oriented silicon periodic cylindrical shape structures are produced during single pulse surface treatment. Silicon periodic structures were modified by external constant magnetic field. Hexagonal structures of the side length about 500 nm and height of the order of 10 nm, are obtained. Morphology investigation was made by SEM and AFM microscopy.
Source:
25th International Conference on Microelectronics, MIEL 2006 - Proceedings, 2006, 149-152
TY - CONF
AU - Dojčinović, I.P.
AU - Kuraica, Milorad M.
AU - Mitrovi, Ć M.
AU - Randjelović, Danijela
AU - Matić, M.
AU - Puri, Ć J.
PY - 2006
UR - https://cer.ihtm.bg.ac.rs/handle/123456789/277
AB - External magnetic field influence on silicon submicron surface periodic structures obtained by the action of nitrogen supersonic quasistationary compression plasma flow (CPF) is studied. CPF is generated by magnetoplasma compressor. It was found that, without external magnetic field, highly-oriented silicon periodic cylindrical shape structures are produced during single pulse surface treatment. Silicon periodic structures were modified by external constant magnetic field. Hexagonal structures of the side length about 500 nm and height of the order of 10 nm, are obtained. Morphology investigation was made by SEM and AFM microscopy.
C3 - 25th International Conference on Microelectronics, MIEL 2006 - Proceedings
T1 - Magnetic field influence on silicon surface periodic structures obtained by plasma flow action
SP - 149
EP - 152
DO - 10.1109/ICMEL.2006.1650916
ER -
@conference{
author = "Dojčinović, I.P. and Kuraica, Milorad M. and Mitrovi, Ć M. and Randjelović, Danijela and Matić, M. and Puri, Ć J.",
year = "2006",
abstract = "External magnetic field influence on silicon submicron surface periodic structures obtained by the action of nitrogen supersonic quasistationary compression plasma flow (CPF) is studied. CPF is generated by magnetoplasma compressor. It was found that, without external magnetic field, highly-oriented silicon periodic cylindrical shape structures are produced during single pulse surface treatment. Silicon periodic structures were modified by external constant magnetic field. Hexagonal structures of the side length about 500 nm and height of the order of 10 nm, are obtained. Morphology investigation was made by SEM and AFM microscopy.",
journal = "25th International Conference on Microelectronics, MIEL 2006 - Proceedings",
title = "Magnetic field influence on silicon surface periodic structures obtained by plasma flow action",
pages = "149-152",
doi = "10.1109/ICMEL.2006.1650916"
}
Dojčinović, I.P., Kuraica, M. M., Mitrovi, Ć. M., Randjelović, D., Matić, M.,& Puri, Ć. J.. (2006). Magnetic field influence on silicon surface periodic structures obtained by plasma flow action. in 25th International Conference on Microelectronics, MIEL 2006 - Proceedings, 149-152.
https://doi.org/10.1109/ICMEL.2006.1650916
Dojčinović I, Kuraica MM, Mitrovi ĆM, Randjelović D, Matić M, Puri ĆJ. Magnetic field influence on silicon surface periodic structures obtained by plasma flow action. in 25th International Conference on Microelectronics, MIEL 2006 - Proceedings. 2006;:149-152.
doi:10.1109/ICMEL.2006.1650916 .
Dojčinović, I.P., Kuraica, Milorad M., Mitrovi, Ć M., Randjelović, Danijela, Matić, M., Puri, Ć J., "Magnetic field influence on silicon surface periodic structures obtained by plasma flow action" in 25th International Conference on Microelectronics, MIEL 2006 - Proceedings (2006):149-152,
https://doi.org/10.1109/ICMEL.2006.1650916 . .
