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dc.creatorJović, Vesna
dc.creatorĐinović, Zoran
dc.creatorRadovanović, Filip
dc.creatorStarčević, Marko
dc.creatorLamovec, Jelena
dc.creatorSmiljanić, Milče
dc.creatorLazić, Žarko
dc.date.accessioned2019-02-06T12:25:38Z
dc.date.available2019-02-06T12:25:38Z
dc.date.issued2014
dc.identifier.urihttp://dais.sanu.ac.rs/123456789/785
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/2605
dc.description.abstractIn this paper we proposed microfabrication scheme for PDMS (Polydimethylsiloxane) thin membrane fabrication on Si micromachined cavities with square cross section. PDMS network samples for this research were synthesized with the same composition, which are Sylgard 184 (Dow Corning, USA) silicone elastomer base and silicone elastomer curing agent, volume ratio 10:1. Mechanical testing of PDMS elastic properties and bond strength between membranes and oxidized Si wafers, were investigated applying pressurized bulge testing In this paper experimentally determined dependence of the PDMS membrane deflection on pressure load for different membrane thicknesses and sizes of square cavities in Si wafers are given. Also, the influence of different types of Si wafer structuring by anisotropic wet chemical etching on membrane bonding strength were considered.en
dc.format(2014) 674-679
dc.formatapplication/pdf
dc.languageen
dc.publisherBelgrade : Military Technical Institute
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//
dc.relationIntegrated Microsystems Austria GmbH, Wiener Neustadt, Österreich – Austrian Center for Medical Inovation and Technology, Phase Change Actuator (PCA) for Steering Catheter (INP 103-PCA)
dc.rightsopenAccess
dc.source6th International Scientific Conference on Defensive Technologies, OTEH 2014, Belgrade, 09-10 October 2014: Proceedingsen
dc.subjectPolydimethylsiloxane (PDMS)
dc.subjectbulk silicon micromachining
dc.subjectsilicone elastomer membrane
dc.subjectbulging test
dc.subjectbonding strength
dc.titleCharacterization of PDMS membranes fabricated by bulkmicromachining on silicon wafersen
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractЂиновић, Зоран; Јовић, Весна; Ламовец, Јелена; Радовановић, Филип; Смиљанић, Милче; Лазић, Жарко; Старчевић, Марко;
dc.citation.spage674
dc.citation.epage679
dc.identifier.fulltexthttp://cer.ihtm.bg.ac.rs//bitstream/id/8913/2604.pdf
dc.type.versionpublishedVersion


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