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Characterization of PDMS membranes fabricated by bulkmicromachining on silicon wafers

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2014
2604.pdf (191.6Kb)
Authors
Jović, Vesna
Đinović, Zoran
Radovanović, Filip
Starčević, Marko
Lamovec, Jelena
Smiljanić, Milče
Lazić, Žarko
Conference object (Published version)
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Abstract
In this paper we proposed microfabrication scheme for PDMS (Polydimethylsiloxane) thin membrane fabrication on Si micromachined cavities with square cross section. PDMS network samples for this research were synthesized with the same composition, which are Sylgard 184 (Dow Corning, USA) silicone elastomer base and silicone elastomer curing agent, volume ratio 10:1. Mechanical testing of PDMS elastic properties and bond strength between membranes and oxidized Si wafers, were investigated applying pressurized bulge testing In this paper experimentally determined dependence of the PDMS membrane deflection on pressure load for different membrane thicknesses and sizes of square cavities in Si wafers are given. Also, the influence of different types of Si wafer structuring by anisotropic wet chemical etching on membrane bonding strength were considered.
Keywords:
Polydimethylsiloxane (PDMS) / bulk silicon micromachining / silicone elastomer membrane / bulging test / bonding strength
Source:
6th International Scientific Conference on Defensive Technologies, OTEH 2014, Belgrade, 09-10 October 2014: Proceedings, 2014, 674-679
Publisher:
  • Belgrade : Military Technical Institute
Funding / projects:
  • Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
  • Integrated Microsystems Austria GmbH, Wiener Neustadt, Österreich – Austrian Center for Medical Inovation and Technology, Phase Change Actuator (PCA) for Steering Catheter (INP 103-PCA)
[ Google Scholar ]
Handle
https://hdl.handle.net/21.15107/rcub_dais_785
URI
http://dais.sanu.ac.rs/123456789/785
https://cer.ihtm.bg.ac.rs/handle/123456789/2605
Collections
  • Radovi istraživača / Researchers' publications
Institution/Community
IHTM
TY  - CONF
AU  - Jović, Vesna
AU  - Đinović, Zoran
AU  - Radovanović, Filip
AU  - Starčević, Marko
AU  - Lamovec, Jelena
AU  - Smiljanić, Milče
AU  - Lazić, Žarko
PY  - 2014
UR  - http://dais.sanu.ac.rs/123456789/785
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/2605
AB  - In this paper we proposed microfabrication scheme for PDMS (Polydimethylsiloxane) thin membrane fabrication on Si micromachined cavities with square cross section. PDMS network samples for this research were synthesized with the same composition, which are Sylgard 184 (Dow Corning, USA) silicone elastomer base and silicone elastomer curing agent, volume ratio 10:1. Mechanical testing of PDMS elastic properties and bond strength between membranes and oxidized Si wafers, were investigated applying pressurized bulge testing In this paper experimentally determined dependence of the PDMS membrane deflection on pressure load for different membrane thicknesses and sizes of square cavities in Si wafers are given. Also, the influence of different types of Si wafer structuring by anisotropic wet chemical etching on membrane bonding strength were considered.
PB  - Belgrade : Military Technical Institute
C3  - 6th International Scientific Conference on Defensive Technologies, OTEH 2014, Belgrade, 09-10 October 2014: Proceedings
T1  - Characterization of PDMS membranes fabricated by bulkmicromachining on silicon wafers
SP  - 674
EP  - 679
UR  - https://hdl.handle.net/21.15107/rcub_dais_785
ER  - 
@conference{
author = "Jović, Vesna and Đinović, Zoran and Radovanović, Filip and Starčević, Marko and Lamovec, Jelena and Smiljanić, Milče and Lazić, Žarko",
year = "2014",
abstract = "In this paper we proposed microfabrication scheme for PDMS (Polydimethylsiloxane) thin membrane fabrication on Si micromachined cavities with square cross section. PDMS network samples for this research were synthesized with the same composition, which are Sylgard 184 (Dow Corning, USA) silicone elastomer base and silicone elastomer curing agent, volume ratio 10:1. Mechanical testing of PDMS elastic properties and bond strength between membranes and oxidized Si wafers, were investigated applying pressurized bulge testing In this paper experimentally determined dependence of the PDMS membrane deflection on pressure load for different membrane thicknesses and sizes of square cavities in Si wafers are given. Also, the influence of different types of Si wafer structuring by anisotropic wet chemical etching on membrane bonding strength were considered.",
publisher = "Belgrade : Military Technical Institute",
journal = "6th International Scientific Conference on Defensive Technologies, OTEH 2014, Belgrade, 09-10 October 2014: Proceedings",
title = "Characterization of PDMS membranes fabricated by bulkmicromachining on silicon wafers",
pages = "674-679",
url = "https://hdl.handle.net/21.15107/rcub_dais_785"
}
Jović, V., Đinović, Z., Radovanović, F., Starčević, M., Lamovec, J., Smiljanić, M.,& Lazić, Ž.. (2014). Characterization of PDMS membranes fabricated by bulkmicromachining on silicon wafers. in 6th International Scientific Conference on Defensive Technologies, OTEH 2014, Belgrade, 09-10 October 2014: Proceedings
Belgrade : Military Technical Institute., 674-679.
https://hdl.handle.net/21.15107/rcub_dais_785
Jović V, Đinović Z, Radovanović F, Starčević M, Lamovec J, Smiljanić M, Lazić Ž. Characterization of PDMS membranes fabricated by bulkmicromachining on silicon wafers. in 6th International Scientific Conference on Defensive Technologies, OTEH 2014, Belgrade, 09-10 October 2014: Proceedings. 2014;:674-679.
https://hdl.handle.net/21.15107/rcub_dais_785 .
Jović, Vesna, Đinović, Zoran, Radovanović, Filip, Starčević, Marko, Lamovec, Jelena, Smiljanić, Milče, Lazić, Žarko, "Characterization of PDMS membranes fabricated by bulkmicromachining on silicon wafers" in 6th International Scientific Conference on Defensive Technologies, OTEH 2014, Belgrade, 09-10 October 2014: Proceedings (2014):674-679,
https://hdl.handle.net/21.15107/rcub_dais_785 .

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