Characterization of PDMS membranes fabricated by bulkmicromachining on silicon wafers

Abstract

In this paper we proposed microfabrication scheme for PDMS (Polydimethylsiloxane) thin membrane fabrication on Si micromachined cavities with square cross section. PDMS network samples for this research were synthesized with the same composition, which are Sylgard 184 (Dow Corning, USA) silicone elastomer base and silicone elastomer curing agent, volume ratio 10:1. Mechanical testing of PDMS elastic properties and bond strength between membranes and oxidized Si wafers, were investigated applying pressurized bulge testing In this paper experimentally determined dependence of the PDMS membrane deflection on pressure load for different membrane thicknesses and sizes of square cavities in Si wafers are given. Also, the influence of different types of Si wafer structuring by anisotropic wet chemical etching on membrane bonding strength were considered.