In this paper we proposed microfabrication scheme for PDMS (Polydimethylsiloxane) thin membrane fabrication on Si micromachined cavities with square cross section. PDMS network samples for this research were synthesized with the same composition, which are Sylgard 184 (Dow Corning, USA) silicone elastomer base and silicone elastomer curing agent, volume ratio 10:1. Mechanical testing of PDMS elastic properties and bond strength between membranes and oxidized Si wafers, were investigated applying pressurized bulge testing In this paper experimentally determined dependence of the PDMS membrane deflection on pressure load for different membrane thicknesses and sizes of square cavities in Si wafers are given. Also, the influence of different types of Si wafer structuring by anisotropic wet chemical etching on membrane bonding strength were considered.
Integrated Microsystems Austria GmbH, Wiener Neustadt, Österreich – Austrian Center for Medical Inovation and Technology, Phase Change Actuator (PCA) for Steering Catheter (INP 103-PCA)
TY - CONF
AU - Jović, Vesna
AU - Đinović, Zoran
AU - Radovanović, Filip
AU - Starčević, Marko
AU - Lamovec, Jelena
AU - Smiljanić, Milče
AU - Lazić, Žarko
PY - 2014
UR - http://dais.sanu.ac.rs/123456789/785
UR - http://cer.ihtm.bg.ac.rs/handle/123456789/2605
AB - In this paper we proposed microfabrication scheme for PDMS (Polydimethylsiloxane) thin membrane fabrication on Si micromachined cavities with square cross section. PDMS network samples for this research were synthesized with the same composition, which are Sylgard 184 (Dow Corning, USA) silicone elastomer base and silicone elastomer curing agent, volume ratio 10:1. Mechanical testing of PDMS elastic properties and bond strength between membranes and oxidized Si wafers, were investigated applying pressurized bulge testing In this paper experimentally determined dependence of the PDMS membrane deflection on pressure load for different membrane thicknesses and sizes of square cavities in Si wafers are given. Also, the influence of different types of Si wafer structuring by anisotropic wet chemical etching on membrane bonding strength were considered.
PB - Belgrade : Military Technical Institute
C3 - 6th International Scientific Conference on Defensive Technologies, OTEH 2014, Belgrade, 09-10 October 2014: Proceedings
T1 - Characterization of PDMS membranes fabricated by bulkmicromachining on silicon wafers
SP - 674
EP - 679
ER -
@conference{
author = "Jović, Vesna and Đinović, Zoran and Radovanović, Filip and Starčević, Marko and Lamovec, Jelena and Smiljanić, Milče and Lazić, Žarko",
year = "2014",
url = "http://dais.sanu.ac.rs/123456789/785, http://cer.ihtm.bg.ac.rs/handle/123456789/2605",
abstract = "In this paper we proposed microfabrication scheme for PDMS (Polydimethylsiloxane) thin membrane fabrication on Si micromachined cavities with square cross section. PDMS network samples for this research were synthesized with the same composition, which are Sylgard 184 (Dow Corning, USA) silicone elastomer base and silicone elastomer curing agent, volume ratio 10:1. Mechanical testing of PDMS elastic properties and bond strength between membranes and oxidized Si wafers, were investigated applying pressurized bulge testing In this paper experimentally determined dependence of the PDMS membrane deflection on pressure load for different membrane thicknesses and sizes of square cavities in Si wafers are given. Also, the influence of different types of Si wafer structuring by anisotropic wet chemical etching on membrane bonding strength were considered.",
publisher = "Belgrade : Military Technical Institute",
journal = "6th International Scientific Conference on Defensive Technologies, OTEH 2014, Belgrade, 09-10 October 2014: Proceedings",
title = "Characterization of PDMS membranes fabricated by bulkmicromachining on silicon wafers",
pages = "674-679"
}
Jović, V., Đinović, Z., Radovanović, F., Starčević, M., Lamovec, J., Smiljanić, M.,& Lazić, Ž. (2014). Characterization of PDMS membranes fabricated by bulkmicromachining on silicon wafers.
6th International Scientific Conference on Defensive Technologies, OTEH 2014, Belgrade, 09-10 October 2014: Proceedings
Belgrade : Military Technical Institute., 674-679.
Jović V, Đinović Z, Radovanović F, Starčević M, Lamovec J, Smiljanić M, Lazić Ž. Characterization of PDMS membranes fabricated by bulkmicromachining on silicon wafers. 6th International Scientific Conference on Defensive Technologies, OTEH 2014, Belgrade, 09-10 October 2014: Proceedings. 2014;:674-679
Jović Vesna, Đinović Zoran, Radovanović Filip, Starčević Marko, Lamovec Jelena, Smiljanić Milče, Lazić Žarko, "Characterization of PDMS membranes fabricated by bulkmicromachining on silicon wafers" 6th International Scientific Conference on Defensive Technologies, OTEH 2014, Belgrade, 09-10 October 2014: Proceedings (2014):674-679
