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Microelectronic sensor of elemental mercury (Hg) in gas phase

dc.contributor.advisorĐurić, Zoran G.
dc.contributor.otherZeković, Ljubiša
dc.contributor.otherStojadinović, Stevan
dc.creatorSarajlić, Milija
dc.date.accessioned2016-01-05T12:51:10Z
dc.date.accessioned2019-02-04T12:27:16Z
dc.date.available2016-01-05T12:51:10Z
dc.date.available2019-02-04T12:27:16Z
dc.date.issued2013
dc.identifier.urihttp://eteze.bg.ac.rs/application/showtheses?thesesId=717
dc.identifier.urihttps://fedorabg.bg.ac.rs/fedora/get/o:6984/bdef:Content/download
dc.identifier.urihttp://vbs.rs/scripts/cobiss?command=DISPLAY&base=70036&RID=44720143
dc.identifier.urihttp://nardus.mpn.gov.rs/123456789/3186
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/2575
dc.description.abstractCilj ove disertacije je razvoj mikroelektronskog adsorpcionog senzora iosvajanje tehnologije njegove proizvodnje za potrebe praćenja aero zagañenja,zaštite životne sredine i primene u industrijskim procesima.Senzor je izrañen pomoću opreme za mikroelektroniku dostupnu na IHTMCMTM u Beogradu i testiran na aparaturi koja može veoma precizno da zadajekocentraciju živine pare u komori senzora.Senzor je testiran na koncentracije žive u atmosferi čistog azota u rasponu od 4do 200 μg/m3. Radna struja senzora u svim eksperimentima je držana na 10 mApomoću strujnog izvora, tj. senzor je radio u modu konstantne struje. Ulazninapon je bio (5,0 ± 0,1) V što odgovara otporu Vitstonovog mosta senzora od(500 ± 10) . Senzor je takoñe testiran na koncentraciju od 14 g/m3 što odgovaranaponu pare žive pri temperaturi od 20 0C. Kompletan ciklus merenja iodgrevanja senzora je prikazan sa objašnjenjem mogućnosti praćenja procesaodgrevanja preko izlaznog napona senzora.U disertaciji je dat metod očitavanja senzora za dobijanje maksimalneosetljivosti. U ovom postupku očitavanja senzora moguće je prag detekcijesniziti ispod 0,18 μg/m3 što je pet puta manje or ranije objavljenih vrednosti iomogućava upotrebu senzora za praćenje malih vrednosti zagañenja.U okviru ove disertacije senzor je unapreñen u smislu nove procedureočitavanja izlaznog signala koja omogućava kontinualno (u svakom trenutkuvremena) praćenje koncentracije žive u gasnoj fazi. Prehodni pokušaji da seostvari kontinualno očitavanje ovakvog senzora zasnivali su se na dodavanjudifuzionog filtera i pravljenju gradijenta koncentracije ispred površine senzora.U ovoj disertaciji pokazano je da je poznavanje trenutne vrednosti izlaznognapona i priraštaja izlaznog napona u vremenu dovoljno za kontinualnoočitavanje senzora. Na ovakav način rešen je ključni problem za praktičnuprimenu senzora.Tehnološki detalji izrade senzora su unapreñeni uvoñenjem novog postupkaizrade sa manjim brojem koraka što pojednostavljuje i snižava cenuproizvodnje. Svi detalji izrade su objašnjeni i na osnovu ovih objašnjenjaMilija Sarajlić Mikroelektronski senzor elementarne žive Rezimemoguće je u potpunosti reprodukovati proces izrade senzora uz posedovanjeodgovarajuće opreme.Disertacija daje pregled mernih metoda i senzora do sada poznatih za merenjekoncentracije živine pare u vazduhu. Poseban akcenat je stavljen na senzore kojifunkcionišu po principu površinske adsorpcije. Ovo iz razloga što senzorrazvijen u okviru teze funkcioniše po istom principu.Opšti podaci o fizičko-hemijskim osobinama žive su dati a takoñe i uticaj živekao zagañivača na ljudsku okolinu. Poseban osvrt dat je na zakonskuregulativu o zaštiti ljudi na radu i u svakodnevnim uslovima.Moguće je pojednostaviti izradu senzora i proizvesti ga pomoću opreme koja jeveć dostupna za izradu mikroelektronskih komponeneti sa najsitnijim detaljimaod 20 μm. Senzor ima osetljivost dovoljno veliku da može da registruje malazagañenja životne okoline, daleko ispod propisanih zakonskih maksimuma.Takoñe, sa novom procedurom kontinualnog očitavanja senzor se možeiskoristiti za praćenje trenutnih promena koncentracije živine pare u atmosferi.sr
dc.description.abstractThe goal of this work was to develop an adsorption based microelectronicsensor along with the technology for its production. The sensor is intended forenvironmental pollution monitoring and applications in the industrialprocesses.The sensor was fabricated by the equipment available at the IHTM CMTM,Belgrade, Serbia and tested on a set-up which allows for precise tuning ofmercury vapor concentration in the sensor chamber.The sensor was tested for different concentrations of mercury vapor in therange from 4 to 200 μg/m3. Mercury vapor was mixed with pure nitrogen andby this mixing various concentrations were achieved. The operating current inall of the experiments was held at 10 mA. The sensor was operating in theconstant current mode. The input voltage was (5 ± 0,1) V which corresponds toa Wheatstone bridge resistance of (500 ± 10) . Together with this, the sensor istested on a concentration of 14 g/m3 which corresponds to the mercury vaporpressure on 20 0C. The complete cycle of the sensor measurement andrestoration is presented.Within this thesis, a method for the sensor readout for maximum sensitivity isdeveloped. The readout procedure for the maximum sensitivity lowers thedetection threshold below the value of 0.18 μg/m3 which is five times lowerthan the previously reported result and enables utilisation of the sensor fordetection of low pollution levels.The sensor is improved in the sense of a new readout procedure which enablescontinuous monitoring of the mercury vapor concentration. Previous attemptsto solve this problem were based on the deployment of the diffusion filterwhich is used to form specific gradient of the mercury vapor concentration infront of the sensor surface. In this dissertation it is shown that knowingtemporal value of the output voltage and derivative of the output voltage overtime is sufficient for the continuous sensor readout. In this way the key problemfor the practical application of the sensor is resolved.Milija Sarajlić Microelectronic sensor of elemental mercury SummarySensor fabrication was improved by introduction of a new manufacturingprocedure with a lower number of technology steps which makes fabricationsimpler and reduces the cost of the sensor production. All details of thefabrication are thoroughly explained, so based on this guidance it is posssible toreproduce fabrication process by having the appropriate equipment.A survey of the methods and sensors for mercury vapor detection is given inthis dissertation. A special attention is given to the sensors based on surfaceadsorption process. This is due to the fact that the sensor developed within thecourse of this work operates on the same principle.General data about physical and chemical properties of the mercury are givenalong with the influence of mercury as a pollutant to the human environment.A special attention is given to the legislative regulations considering workingenvironment protection and human health.It is possible to simplify the fabrication of the sensor and to use to this purposethe equipment already available for the production of microelectroniccomponents with smallest features of 20 μm. The sensor has high sensitivity sothat it can register low level pollutions, much lower than the maximumexposure levels set by the legislations. With the new procedure of continuousmonitoring proposed in this dissertation the sensor can be used for real-timedetection of mercury vapor concentation in air.en
dc.formatapplication/pdf
dc.languagesr
dc.publisherУниверзитет у Београду, Физички факултетsr
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//
dc.rightsopenAccess
dc.sourceУниверзитет у Београдуsr
dc.subjectživa, živina para, senzor, mikroelektronski senzor, adsorpcionisenzor, hemijski senzor, adsorpcija, procedura očitavanja, mikroelektronika,tanak sloj.sr
dc.subjectmercury, mercury vapor, sensor, microelectronic sensor, adsorptionbased sensor, chemical sensor, adsorption, readout procedure, microelectronics,thin film.en
dc.titleMikroelektronski senzor elementarne žive (Hg) u gasnoj fazisr
dc.titleMicroelectronic sensor of elemental mercury (Hg) in gas phaseen
dc.typedoctoralThesisen
dc.rights.licenseBY-NC-ND
dcterms.abstractЂурић, Зоран Г.; Зековић, Љубиша; Стојадиновић, Стеван; Сарајлић, Милија; Микроелектронски сензор елементарне живе (Хг) у гасној фази; Микроелектронски сензор елементарне живе (Хг) у гасној фази;
dc.identifier.fulltexthttp://cer.ihtm.bg.ac.rs/bitstream/id/5823/Disertacija.pdf


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