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dc.creatorĐurić, Zoran G.
dc.creatorJakšić, Olga
dc.creatorJokić, Ivana
dc.creatorFrantlović, Miloš
dc.date.accessioned2019-01-30T17:14:18Z
dc.date.available2019-01-30T17:14:18Z
dc.date.issued2006
dc.identifier.isbn1-4244-0117-8
dc.identifier.issn2159-1660
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/253
dc.description.abstractMicro/nanoresonator mass and frequency fluctuations caused by sorption processes on a resonator surface are investigated. Arbitrary gas mixture is considered. assuming that particle arrivals at the surface are all poissonian in nature. independent from each other, and that sorption dynamics follows the Langmuir isotherm. Power spectral density for mass fluctuations are derived using the analytical Langevin approach. The results of simulations are given for a silicon micro/nanocantilever in the atmosphere of four gases. The presented analysis is useful for calculation of the ultimate performance of MEMS/NEMS sensors and oscillators, as well as for investigation of the possibilities of their parameters optimization by choosing the gas mixture in the cantilever's atmosphere. Another objective is to consider the possibility of identification of gases in the mixture, based on the power spectral density of the adsorbed mass fluctuation.en
dc.publisherInstitute of Electrical and Electronics Engineers Inc.
dc.relationSerbian Ministry of Science
dc.relationTR6151 - Micro and Nanosystem Technologies, Structures and Sensors
dc.rightsrestrictedAccess
dc.source25th International Conference on Microelectronics, MIEL 2006 - Proceedings
dc.subjectcantilevers
dc.subjectgas mixtures
dc.subjectisothermal transformations
dc.subjectLangmuir-Blodgett films
dc.subjectmicromechanical resonators
dc.subjectmicrosensors
dc.subjectsorption
dc.subjectMicromechanical devices
dc.subjectNanoelectromechanical systems
dc.subjectGas detectors
dc.titleAdsorbed mass fluctuations of a micro/nanoresonator surrounded by an arbitrary gas mixtureen
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractЈокић, Ивана; Јакшић, Олга; Ђурић, Зоран Г.; Франтловић, Милош;
dc.citation.spage103
dc.citation.other: 103
dc.identifier.doi10.1109/ICMEL.2006.1650904
dc.identifier.rcubConv_2357
dc.identifier.scopus2-s2.0-77956511905
dc.identifier.wos000238839700015
dc.type.versionpublishedVersion


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