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IR bimaterial detectors performance

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2006
Authors
Đurić, Zoran G.
Ranđelović, Danijela
Matovic, J.
Lamovec, Jelena
Conference object (Published version)
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Abstract
In this paper basic parameters of a bimaterial infrared thermal detector (BMD) - sensitivity, noise equivalent power, detectivity - and their dependence on relevant thermal and mechanical parameters are given. In order to find sensitivity and noise we introduce an equivalent "thermo mechanical" excitation force for microelctromechanical bimaterial oscillator and solved equation for this oscillator assuming only first mode of vibration. After the identification of all important noise mechanisms (temperature fluctuations, Brownian motion), we solved the appropriate Langevin stochastic equation and obtained the mean square deflection of the bimaterial cantilever oscillator. This enabled us to determine all of the important parameters for BMD.
Source:
25th International Conference on Microelectronics, MIEL 2006 - Proceedings, 2006, 241-
Publisher:
  • Institute of Electrical and Electronics Engineers Inc.

DOI: 10.1109/ICMEL.2006.1650937

ISSN: 2159-1660

WoS: 000238839700044

Scopus: 2-s2.0-77956537122
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URI
http://cer.ihtm.bg.ac.rs/handle/123456789/244
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IHTM

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