| dc.creator | Todorović, D. M. | |
| dc.creator | Nikolić, P.M. | |
| dc.creator | Elazar, J. | |
| dc.creator | Smiljanić, Miloljub | |
| dc.creator | Bojičić, A.I. | |
| dc.creator | Vasiljević-Radović, Dana | |
| dc.creator | Radulović, Katarina | |
| dc.date.accessioned | 2019-01-30T17:09:19Z | |
| dc.date.available | 2019-01-30T17:09:19Z | |
| dc.date.issued | 2000 | |
| dc.identifier.isbn | 0-7803-5235-1 | |
| dc.identifier.uri | https://cer.ihtm.bg.ac.rs/handle/123456789/23 | |
| dc.description.abstract | Thermal, elastic and electronic transport properties of ion-modified silicon samples were investigated by a photoacoustic frequency transmission technique. The experimental photoacoustic data vs the modulating frequency were measured and analyzed. The experimental results show a clear influence of the process of ion-modification on the photoacoustic signal. The thermal, elastic and electronic transport parameters of ion-modified semiconductors were obtained by comparing the experimental and calculated theoretical photoacoustic signal which provide an indicator of the degree of modification. | en |
| dc.publisher | IEEE Computer Society | |
| dc.rights | restrictedAccess | |
| dc.source | 22nd International Conference on Microelectronics, MIEL 2000 - Proceedings | |
| dc.subject | Silicon | |
| dc.subject | Frequency | |
| dc.subject | Thermoelasticity | |
| dc.subject | Microphones | |
| dc.subject | Plasma devices | |
| dc.subject | Plasma immersion ion implantation | |
| dc.subject | Plasma materials processing | |
| dc.subject | Plasma waves | |
| dc.subject | Semiconductor materials | |
| dc.subject | Ion implantation | |
| dc.title | Investigation of ion-beam modified silicon by photoacoustic method | en |
| dc.type | conferenceObject | |
| dc.rights.license | ARR | |
| dcterms.abstract | Бојичић, A.И.; Николић, П.М.; Елазар, Ј.; Тодоровић, Д. М.; Радуловић, Катарина; Васиљевић-Радовић, Дана; Смиљанић, Милољуб; | |
| dc.citation.volume | 1 | |
| dc.citation.spage | 247 | |
| dc.citation.epage | 250 | |
| dc.citation.other | 1: 247-250 | |
| dc.identifier.doi | 10.1109/ICMEL.2000.840566 | |
| dc.identifier.scopus | 2-s2.0-0033299508 | |
| dc.type.version | publishedVersion | |
