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dc.creatorSarajlić, Milija
dc.creatorFrantlović, Miloš
dc.creatorPoljak, Predrag
dc.creatorRadulović, Katarina
dc.creatorVasiljević-Radović, Dana
dc.date.accessioned2019-01-30T17:59:40Z
dc.date.available2019-01-30T17:59:40Z
dc.date.issued2018
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/2398
dc.description.abstractTest of a sensor with four resistors structure on its sensitivity as a temperature probe is described. The chip is sensitive on a temperature difference between Si substrate and air and less sensitive on the temperature of the whole chip. The sensor consists out of four resistors realized as metal meanders on a silicon chip patterned in 150 nm thick gold layer whose lateral dimensions are 0.94 mm by 0.6 mm and the length 14.1 mm. Width of meander line is 0.02 mm with clearance 0.02 mm. The resistors form Wheatstone bridge configuration. Current through resistors was kept constant on 5 mA. Offset of the bridge on no temperature difference was 1.5 mV. In the case of temperature difference on the sensor surface, sensor output is changing with linear dependence. This has a potential for the use in temperature stabilization systems.en
dc.publisherInstitute of Electrical and Electronics Engineers Inc.
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32019/RS//
dc.rightsrestrictedAccess
dc.sourceProceedings of the International Semiconductor Conference, CAS
dc.subjectSensoren
dc.subjectTemperature measurementen
dc.subjectTemperature sensoren
dc.titleTemperature Measurements with Four-Resistor Sensor Patterned on Golden Layeren
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractСарајлић, Милија; Франтловић, Милош; Радуловић, Катарина; Пољак, Предраг; Радовиц, Д.В.;
dc.citation.spage295
dc.citation.epage297
dc.citation.other: 295-297
dc.identifier.doi10.1109/SMICND.2018.8539828
dc.identifier.rcubConv_4500
dc.identifier.scopus2-s2.0-85059650280
dc.type.versionpublishedVersion


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