Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer
Authorized Users Only
2018
Authors
Sarajlić, MilijaFrantlović, Miloš
Poljak, Predrag
Radulović, Katarina
Vasiljević-Radović, Dana
Conference object (Published version)
Metadata
Show full item recordAbstract
Test of a sensor with four resistors structure on its sensitivity as a temperature probe is described. The chip is sensitive on a temperature difference between Si substrate and air and less sensitive on the temperature of the whole chip. The sensor consists out of four resistors realized as metal meanders on a silicon chip patterned in 150 nm thick gold layer whose lateral dimensions are 0.94 mm by 0.6 mm and the length 14.1 mm. Width of meander line is 0.02 mm with clearance 0.02 mm. The resistors form Wheatstone bridge configuration. Current through resistors was kept constant on 5 mA. Offset of the bridge on no temperature difference was 1.5 mV. In the case of temperature difference on the sensor surface, sensor output is changing with linear dependence. This has a potential for the use in temperature stabilization systems.
Keywords:
Sensor / Temperature measurement / Temperature sensorSource:
Proceedings of the International Semiconductor Conference, CAS, 2018, 295-297Publisher:
- Institute of Electrical and Electronics Engineers Inc.
Funding / projects:
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-MESTD-Technological Development (TD or TR)-32008)
- Measurements in a smart grid concept (RS-MESTD-Technological Development (TD or TR)-32019)
Collections
Institution/Community
IHTMTY - CONF AU - Sarajlić, Milija AU - Frantlović, Miloš AU - Poljak, Predrag AU - Radulović, Katarina AU - Vasiljević-Radović, Dana PY - 2018 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/2398 AB - Test of a sensor with four resistors structure on its sensitivity as a temperature probe is described. The chip is sensitive on a temperature difference between Si substrate and air and less sensitive on the temperature of the whole chip. The sensor consists out of four resistors realized as metal meanders on a silicon chip patterned in 150 nm thick gold layer whose lateral dimensions are 0.94 mm by 0.6 mm and the length 14.1 mm. Width of meander line is 0.02 mm with clearance 0.02 mm. The resistors form Wheatstone bridge configuration. Current through resistors was kept constant on 5 mA. Offset of the bridge on no temperature difference was 1.5 mV. In the case of temperature difference on the sensor surface, sensor output is changing with linear dependence. This has a potential for the use in temperature stabilization systems. PB - Institute of Electrical and Electronics Engineers Inc. C3 - Proceedings of the International Semiconductor Conference, CAS T1 - Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer SP - 295 EP - 297 DO - 10.1109/SMICND.2018.8539828 ER -
@conference{ author = "Sarajlić, Milija and Frantlović, Miloš and Poljak, Predrag and Radulović, Katarina and Vasiljević-Radović, Dana", year = "2018", abstract = "Test of a sensor with four resistors structure on its sensitivity as a temperature probe is described. The chip is sensitive on a temperature difference between Si substrate and air and less sensitive on the temperature of the whole chip. The sensor consists out of four resistors realized as metal meanders on a silicon chip patterned in 150 nm thick gold layer whose lateral dimensions are 0.94 mm by 0.6 mm and the length 14.1 mm. Width of meander line is 0.02 mm with clearance 0.02 mm. The resistors form Wheatstone bridge configuration. Current through resistors was kept constant on 5 mA. Offset of the bridge on no temperature difference was 1.5 mV. In the case of temperature difference on the sensor surface, sensor output is changing with linear dependence. This has a potential for the use in temperature stabilization systems.", publisher = "Institute of Electrical and Electronics Engineers Inc.", journal = "Proceedings of the International Semiconductor Conference, CAS", title = "Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer", pages = "295-297", doi = "10.1109/SMICND.2018.8539828" }
Sarajlić, M., Frantlović, M., Poljak, P., Radulović, K.,& Vasiljević-Radović, D.. (2018). Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer. in Proceedings of the International Semiconductor Conference, CAS Institute of Electrical and Electronics Engineers Inc.., 295-297. https://doi.org/10.1109/SMICND.2018.8539828
Sarajlić M, Frantlović M, Poljak P, Radulović K, Vasiljević-Radović D. Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer. in Proceedings of the International Semiconductor Conference, CAS. 2018;:295-297. doi:10.1109/SMICND.2018.8539828 .
Sarajlić, Milija, Frantlović, Miloš, Poljak, Predrag, Radulović, Katarina, Vasiljević-Radović, Dana, "Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer" in Proceedings of the International Semiconductor Conference, CAS (2018):295-297, https://doi.org/10.1109/SMICND.2018.8539828 . .