Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer
Само за регистроване кориснике
2018
Аутори
Sarajlić, MilijaFrantlović, Miloš
Poljak, Predrag
Radulović, Katarina
Vasiljević-Radović, Dana
Конференцијски прилог (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
Test of a sensor with four resistors structure on its sensitivity as a temperature probe is described. The chip is sensitive on a temperature difference between Si substrate and air and less sensitive on the temperature of the whole chip. The sensor consists out of four resistors realized as metal meanders on a silicon chip patterned in 150 nm thick gold layer whose lateral dimensions are 0.94 mm by 0.6 mm and the length 14.1 mm. Width of meander line is 0.02 mm with clearance 0.02 mm. The resistors form Wheatstone bridge configuration. Current through resistors was kept constant on 5 mA. Offset of the bridge on no temperature difference was 1.5 mV. In the case of temperature difference on the sensor surface, sensor output is changing with linear dependence. This has a potential for the use in temperature stabilization systems.
Кључне речи:
Sensor / Temperature measurement / Temperature sensorИзвор:
Proceedings of the International Semiconductor Conference, CAS, 2018, 295-297Издавач:
- Institute of Electrical and Electronics Engineers Inc.
Финансирање / пројекти:
- Микро, нано-системи и сензори за примену у електропривреди, процесној индустрији и заштити животне средине (RS-MESTD-Technological Development (TD or TR)-32008)
- Мерења у концепту ""паметне"" дистрибутивне мреже (RS-MESTD-Technological Development (TD or TR)-32019)
Институција/група
IHTMTY - CONF AU - Sarajlić, Milija AU - Frantlović, Miloš AU - Poljak, Predrag AU - Radulović, Katarina AU - Vasiljević-Radović, Dana PY - 2018 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/2398 AB - Test of a sensor with four resistors structure on its sensitivity as a temperature probe is described. The chip is sensitive on a temperature difference between Si substrate and air and less sensitive on the temperature of the whole chip. The sensor consists out of four resistors realized as metal meanders on a silicon chip patterned in 150 nm thick gold layer whose lateral dimensions are 0.94 mm by 0.6 mm and the length 14.1 mm. Width of meander line is 0.02 mm with clearance 0.02 mm. The resistors form Wheatstone bridge configuration. Current through resistors was kept constant on 5 mA. Offset of the bridge on no temperature difference was 1.5 mV. In the case of temperature difference on the sensor surface, sensor output is changing with linear dependence. This has a potential for the use in temperature stabilization systems. PB - Institute of Electrical and Electronics Engineers Inc. C3 - Proceedings of the International Semiconductor Conference, CAS T1 - Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer SP - 295 EP - 297 DO - 10.1109/SMICND.2018.8539828 ER -
@conference{ author = "Sarajlić, Milija and Frantlović, Miloš and Poljak, Predrag and Radulović, Katarina and Vasiljević-Radović, Dana", year = "2018", abstract = "Test of a sensor with four resistors structure on its sensitivity as a temperature probe is described. The chip is sensitive on a temperature difference between Si substrate and air and less sensitive on the temperature of the whole chip. The sensor consists out of four resistors realized as metal meanders on a silicon chip patterned in 150 nm thick gold layer whose lateral dimensions are 0.94 mm by 0.6 mm and the length 14.1 mm. Width of meander line is 0.02 mm with clearance 0.02 mm. The resistors form Wheatstone bridge configuration. Current through resistors was kept constant on 5 mA. Offset of the bridge on no temperature difference was 1.5 mV. In the case of temperature difference on the sensor surface, sensor output is changing with linear dependence. This has a potential for the use in temperature stabilization systems.", publisher = "Institute of Electrical and Electronics Engineers Inc.", journal = "Proceedings of the International Semiconductor Conference, CAS", title = "Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer", pages = "295-297", doi = "10.1109/SMICND.2018.8539828" }
Sarajlić, M., Frantlović, M., Poljak, P., Radulović, K.,& Vasiljević-Radović, D.. (2018). Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer. in Proceedings of the International Semiconductor Conference, CAS Institute of Electrical and Electronics Engineers Inc.., 295-297. https://doi.org/10.1109/SMICND.2018.8539828
Sarajlić M, Frantlović M, Poljak P, Radulović K, Vasiljević-Radović D. Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer. in Proceedings of the International Semiconductor Conference, CAS. 2018;:295-297. doi:10.1109/SMICND.2018.8539828 .
Sarajlić, Milija, Frantlović, Miloš, Poljak, Predrag, Radulović, Katarina, Vasiljević-Radović, Dana, "Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer" in Proceedings of the International Semiconductor Conference, CAS (2018):295-297, https://doi.org/10.1109/SMICND.2018.8539828 . .