Test of a sensor with four resistors structure on its sensitivity as a temperature probe is described. The chip is sensitive on a temperature difference between Si substrate and air and less sensitive on the temperature of the whole chip. The sensor consists out of four resistors realized as metal meanders on a silicon chip patterned in 150 nm thick gold layer whose lateral dimensions are 0.94 mm by 0.6 mm and the length 14.1 mm. Width of meander line is 0.02 mm with clearance 0.02 mm. The resistors form Wheatstone bridge configuration. Current through resistors was kept constant on 5 mA. Offset of the bridge on no temperature difference was 1.5 mV. In the case of temperature difference on the sensor surface, sensor output is changing with linear dependence. This has a potential for the use in temperature stabilization systems.
Keywords:
Sensor / Temperature measurement / Temperature sensor
Source:
Proceedings of the International Semiconductor Conference, CAS, 2018, 295-297
Publisher:
Institute of Electrical and Electronics Engineers Inc.
TY - CONF
AU - Sarajlić, Milija
AU - Frantlović, Miloš
AU - Poljak, Predrag
AU - Radulović, Katarina
AU - Vasiljević-Radović, Dana
PY - 2018
UR - https://cer.ihtm.bg.ac.rs/handle/123456789/2398
AB - Test of a sensor with four resistors structure on its sensitivity as a temperature probe is described. The chip is sensitive on a temperature difference between Si substrate and air and less sensitive on the temperature of the whole chip. The sensor consists out of four resistors realized as metal meanders on a silicon chip patterned in 150 nm thick gold layer whose lateral dimensions are 0.94 mm by 0.6 mm and the length 14.1 mm. Width of meander line is 0.02 mm with clearance 0.02 mm. The resistors form Wheatstone bridge configuration. Current through resistors was kept constant on 5 mA. Offset of the bridge on no temperature difference was 1.5 mV. In the case of temperature difference on the sensor surface, sensor output is changing with linear dependence. This has a potential for the use in temperature stabilization systems.
PB - Institute of Electrical and Electronics Engineers Inc.
C3 - Proceedings of the International Semiconductor Conference, CAS
T1 - Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer
SP - 295
EP - 297
DO - 10.1109/SMICND.2018.8539828
ER -
@conference{
author = "Sarajlić, Milija and Frantlović, Miloš and Poljak, Predrag and Radulović, Katarina and Vasiljević-Radović, Dana",
year = "2018",
abstract = "Test of a sensor with four resistors structure on its sensitivity as a temperature probe is described. The chip is sensitive on a temperature difference between Si substrate and air and less sensitive on the temperature of the whole chip. The sensor consists out of four resistors realized as metal meanders on a silicon chip patterned in 150 nm thick gold layer whose lateral dimensions are 0.94 mm by 0.6 mm and the length 14.1 mm. Width of meander line is 0.02 mm with clearance 0.02 mm. The resistors form Wheatstone bridge configuration. Current through resistors was kept constant on 5 mA. Offset of the bridge on no temperature difference was 1.5 mV. In the case of temperature difference on the sensor surface, sensor output is changing with linear dependence. This has a potential for the use in temperature stabilization systems.",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
journal = "Proceedings of the International Semiconductor Conference, CAS",
title = "Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer",
pages = "295-297",
doi = "10.1109/SMICND.2018.8539828"
}
Sarajlić, M., Frantlović, M., Poljak, P., Radulović, K.,& Vasiljević-Radović, D.. (2018). Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer. in Proceedings of the International Semiconductor Conference, CAS
Institute of Electrical and Electronics Engineers Inc.., 295-297.
https://doi.org/10.1109/SMICND.2018.8539828
Sarajlić M, Frantlović M, Poljak P, Radulović K, Vasiljević-Radović D. Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer. in Proceedings of the International Semiconductor Conference, CAS. 2018;:295-297.
doi:10.1109/SMICND.2018.8539828 .
Sarajlić, Milija, Frantlović, Miloš, Poljak, Predrag, Radulović, Katarina, Vasiljević-Radović, Dana, "Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer" in Proceedings of the International Semiconductor Conference, CAS (2018):295-297,
https://doi.org/10.1109/SMICND.2018.8539828 . .
