Analytical Modelling Approach in Study of the Transient Response of Thermopile-Based MEMS Sensors Applied for Simultaneous Detection of Pressure and Gas Composition
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This work demonstrates how binary gas mixture composition and pressure can be simultaneously determined based on the value of thermal time constant of thermopile-based MEMS sensor. Self-developed analytical model for transient analysis is applied initially to define optimal design of the thermal sensor in terms of the residual n-Si thickness and the number of thermocouples. Procedure for detection of gas mixture composition and pressure was implemented on thermal sensor placed in binary gas mixtures used as shielding gases in industrial processes of welding, cutting and melting of metals.
Keywords:Analytical model / Gas sensor / Thermal time constant / Thermopile
Source:Proceedings of the International Semiconductor Conference, CAS, 2018, 27-34
- Institute of Electrical and Electronics Engineers Inc.