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dc.creatorTodorović, D. M.
dc.creatorRabasovic, M. D.
dc.creatorMarkushev, D. D.
dc.creatorJović, Vesna
dc.creatorRadulović, Katarina
dc.date.accessioned2019-01-30T17:55:24Z
dc.date.available2019-01-30T17:55:24Z
dc.date.issued2017
dc.identifier.issn0195-928X
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/2193
dc.description.abstractRectangular silicon cantilevers are studied by the photoacoustic (PA) elastic bending method. Experimental signals versus modulation frequency of the excitation optical beam are measured and analyzed in a frequency range from 20 Hz to 50 000 Hz. The procedure for experimental signal correction to eliminate the frequency characteristics of the measuring system is given. The corrected experimental signal shows a good correlation with theoretically calculated PA signal at frequencies below 32 000 Hz. The corrected experimental PA elastic bending signals for cantilevers with different thicknesses are analyzed. The experimental results allow identifying the resonant frequency (the first resonant mode) of the cantilever vibrations. These values are in good agreement with the theoretically computed values. A theoretical model of the optically excited Si cantilever is derived, taking into account plasmaelastic, thermoelastic, and thermodiffusion mechanisms. Dynamic relations for the amplitude and phase of electronic and thermal elastic vibrations in optically excited cantilevers are derived. The theoretical model is compared to the experimental results.en
dc.publisherSpringer/Plenum Publishers, New York
dc.relationinfo:eu-repo/grantAgreement/MESTD/Basic Research (BR or ON)/171016/RS//
dc.rightsrestrictedAccess
dc.sourceInternational Journal of Thermophysics
dc.subjectCantileveren
dc.subjectPhotoacousticen
dc.subjectPlasmaelasticen
dc.subjectThermoelasticen
dc.titleStudy of Silicon Cantilevers by the Photoacoustic Elastic Bending Methoden
dc.typearticle
dc.rights.licenseARR
dcterms.abstractМаркусхев, Д. Д.; Рабасовиц, М. Д.; Радуловић, Катарина; Тодоровиц, Д. М.; Јовић, Весна;
dc.citation.volume38
dc.citation.issue3
dc.citation.other38(3):
dc.citation.rankM23
dc.identifier.doi10.1007/s10765-016-2175-5
dc.identifier.rcubConv_3681
dc.identifier.scopus2-s2.0-85008395848
dc.identifier.wos000394983900006
dc.type.versionpublishedVersion


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