Simulation of performance of thermopile based gas sensors applied for emission monitoring in thermal power plants
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There is a growing demand for inexpensive and efficient gas sensors which have important applications in various areas including industrial safety and emission monitoring in coal fired and lignite based thermal power plants. Various air polluting and hazardous gases are emitted from power plants (Hydrogen (H-2), Nitrogen Dioxide (NO2), Chlorine (Cl-2), Carbon Dioxide (CO2), Sulfur Dioxide (SO2), etc). The main goal of this work is to study suitability of use of thermopile based MEMS sensors in systems for gas emission monitoring in thermal power plants using self-developed 1D analytical model.
Ključne reči:gas sensors / modelling / power plants / SOI / thermopile
Izvor:Proceedings of the International Semiconductor Conference, CAS, 2017, 109-112
- Institute of Electrical and Electronics Engineers Inc.