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dc.creatorPoljak, Predrag
dc.creatorFrantlović, Miloš
dc.creatorSmiljanić, Milče
dc.creatorLazić, Žarko
dc.creatorJokić, Ivana
dc.creatorRanđelović, Danijela
dc.creatorMitrovic, Zoran
dc.date.accessioned2019-01-30T17:53:50Z
dc.date.available2019-01-30T17:53:50Z
dc.date.issued2017
dc.identifier.issn1545-827X
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/2117
dc.description.abstractIn this paper a measurement setup is presented that enables automatic characterization of silicon piezoresistive MEMS pressure sensors. It is used for determination of the pressure and temperature dependences of sensor electrical parameters. Some of the equipment in the setup, and the software application that controls the process, are developed at the Center of Microelectronic Technologies (CMT). The main objective of the work is to make the sensor characterization experiment as efficient as possible, without sacrificing measurement performance. An example of obtained measurement results is given for 3 sensors fabricated at CMT. The work greatly facilitates small series production of pressure sensors and instruments, as well as research activities in the field of pressure sensors at CMT.en
dc.publisherInstitute of Electrical and Electronics Engineers Inc.
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32019/RS//
dc.rightsrestrictedAccess
dc.sourceProceedings of the International Semiconductor Conference, CAS
dc.subjectMEMS sensoren
dc.subjectpressureen
dc.subjectmeasurement setupen
dc.subjectcharacterizationen
dc.titleA Measurement Setup Enabling Automatic Characterization of Silicon Piezoresistive MEMS Pressure Sensorsen
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractМитровиц, Зоран; Смиљанић, Милче; Ранђеловић, Данијела; Лазић, Жарко; Јокић, Ивана; Франтловић, Милош; Пољак, Предраг;
dc.citation.spage237
dc.citation.epage240
dc.citation.other: 237-240
dc.identifier.doi10.1109/SMICND.2017.8101211
dc.identifier.rcubConv_3881
dc.identifier.scopus2-s2.0-85040532623
dc.identifier.wos000425844500051
dc.type.versionpublishedVersion


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