A Measurement Setup Enabling Automatic Characterization of Silicon Piezoresistive MEMS Pressure Sensors
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2017
Authors
Poljak, Predrag
Frantlović, Miloš

Smiljanić, Milče

Lazić, Žarko

Jokić, Ivana

Randjelović, Danijela

Mitrovic, Zoran
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In this paper a measurement setup is presented that enables automatic characterization of silicon piezoresistive MEMS pressure sensors. It is used for determination of the pressure and temperature dependences of sensor electrical parameters. Some of the equipment in the setup, and the software application that controls the process, are developed at the Center of Microelectronic Technologies (CMT). The main objective of the work is to make the sensor characterization experiment as efficient as possible, without sacrificing measurement performance. An example of obtained measurement results is given for 3 sensors fabricated at CMT. The work greatly facilitates small series production of pressure sensors and instruments, as well as research activities in the field of pressure sensors at CMT.
Keywords:
MEMS sensor / pressure / measurement setup / characterizationSource:
Proceedings of the International Semiconductor Conference, CAS, 2017, 237-240Publisher:
- Institute of Electrical and Electronics Engineers Inc.
Funding / projects:
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
- Measurements in a smart grid concept (RS-32019)
DOI: 10.1109/SMICND.2017.8101211
ISSN: 1545-827X
WoS: 000425844500051
Scopus: 2-s2.0-85040532623
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IHTMTY - CONF AU - Poljak, Predrag AU - Frantlović, Miloš AU - Smiljanić, Milče AU - Lazić, Žarko AU - Jokić, Ivana AU - Randjelović, Danijela AU - Mitrovic, Zoran PY - 2017 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/2117 AB - In this paper a measurement setup is presented that enables automatic characterization of silicon piezoresistive MEMS pressure sensors. It is used for determination of the pressure and temperature dependences of sensor electrical parameters. Some of the equipment in the setup, and the software application that controls the process, are developed at the Center of Microelectronic Technologies (CMT). The main objective of the work is to make the sensor characterization experiment as efficient as possible, without sacrificing measurement performance. An example of obtained measurement results is given for 3 sensors fabricated at CMT. The work greatly facilitates small series production of pressure sensors and instruments, as well as research activities in the field of pressure sensors at CMT. PB - Institute of Electrical and Electronics Engineers Inc. C3 - Proceedings of the International Semiconductor Conference, CAS T1 - A Measurement Setup Enabling Automatic Characterization of Silicon Piezoresistive MEMS Pressure Sensors SP - 237 EP - 240 DO - 10.1109/SMICND.2017.8101211 ER -
@conference{ author = "Poljak, Predrag and Frantlović, Miloš and Smiljanić, Milče and Lazić, Žarko and Jokić, Ivana and Randjelović, Danijela and Mitrovic, Zoran", year = "2017", abstract = "In this paper a measurement setup is presented that enables automatic characterization of silicon piezoresistive MEMS pressure sensors. It is used for determination of the pressure and temperature dependences of sensor electrical parameters. Some of the equipment in the setup, and the software application that controls the process, are developed at the Center of Microelectronic Technologies (CMT). The main objective of the work is to make the sensor characterization experiment as efficient as possible, without sacrificing measurement performance. An example of obtained measurement results is given for 3 sensors fabricated at CMT. The work greatly facilitates small series production of pressure sensors and instruments, as well as research activities in the field of pressure sensors at CMT.", publisher = "Institute of Electrical and Electronics Engineers Inc.", journal = "Proceedings of the International Semiconductor Conference, CAS", title = "A Measurement Setup Enabling Automatic Characterization of Silicon Piezoresistive MEMS Pressure Sensors", pages = "237-240", doi = "10.1109/SMICND.2017.8101211" }
Poljak, P., Frantlović, M., Smiljanić, M., Lazić, Ž., Jokić, I., Randjelović, D.,& Mitrovic, Z.. (2017). A Measurement Setup Enabling Automatic Characterization of Silicon Piezoresistive MEMS Pressure Sensors. in Proceedings of the International Semiconductor Conference, CAS Institute of Electrical and Electronics Engineers Inc.., 237-240. https://doi.org/10.1109/SMICND.2017.8101211
Poljak P, Frantlović M, Smiljanić M, Lazić Ž, Jokić I, Randjelović D, Mitrovic Z. A Measurement Setup Enabling Automatic Characterization of Silicon Piezoresistive MEMS Pressure Sensors. in Proceedings of the International Semiconductor Conference, CAS. 2017;:237-240. doi:10.1109/SMICND.2017.8101211 .
Poljak, Predrag, Frantlović, Miloš, Smiljanić, Milče, Lazić, Žarko, Jokić, Ivana, Randjelović, Danijela, Mitrovic, Zoran, "A Measurement Setup Enabling Automatic Characterization of Silicon Piezoresistive MEMS Pressure Sensors" in Proceedings of the International Semiconductor Conference, CAS (2017):237-240, https://doi.org/10.1109/SMICND.2017.8101211 . .