In this paper a measurement setup is presented that enables automatic characterization of silicon piezoresistive MEMS pressure sensors. It is used for determination of the pressure and temperature dependences of sensor electrical parameters. Some of the equipment in the setup, and the software application that controls the process, are developed at the Center of Microelectronic Technologies (CMT). The main objective of the work is to make the sensor characterization experiment as efficient as possible, without sacrificing measurement performance. An example of obtained measurement results is given for 3 sensors fabricated at CMT. The work greatly facilitates small series production of pressure sensors and instruments, as well as research activities in the field of pressure sensors at CMT.
TY - CONF
AU - Poljak, Predrag
AU - Frantlović, Miloš
AU - Smiljanić, Milče
AU - Lazić, Žarko
AU - Jokić, Ivana
AU - Randjelović, Danijela
AU - Mitrovic, Zoran
PY - 2017
UR - https://cer.ihtm.bg.ac.rs/handle/123456789/2117
AB - In this paper a measurement setup is presented that enables automatic characterization of silicon piezoresistive MEMS pressure sensors. It is used for determination of the pressure and temperature dependences of sensor electrical parameters. Some of the equipment in the setup, and the software application that controls the process, are developed at the Center of Microelectronic Technologies (CMT). The main objective of the work is to make the sensor characterization experiment as efficient as possible, without sacrificing measurement performance. An example of obtained measurement results is given for 3 sensors fabricated at CMT. The work greatly facilitates small series production of pressure sensors and instruments, as well as research activities in the field of pressure sensors at CMT.
PB - Institute of Electrical and Electronics Engineers Inc.
C3 - Proceedings of the International Semiconductor Conference, CAS
T1 - A Measurement Setup Enabling Automatic Characterization of Silicon Piezoresistive MEMS Pressure Sensors
SP - 237
EP - 240
DO - 10.1109/SMICND.2017.8101211
ER -
@conference{
author = "Poljak, Predrag and Frantlović, Miloš and Smiljanić, Milče and Lazić, Žarko and Jokić, Ivana and Randjelović, Danijela and Mitrovic, Zoran",
year = "2017",
abstract = "In this paper a measurement setup is presented that enables automatic characterization of silicon piezoresistive MEMS pressure sensors. It is used for determination of the pressure and temperature dependences of sensor electrical parameters. Some of the equipment in the setup, and the software application that controls the process, are developed at the Center of Microelectronic Technologies (CMT). The main objective of the work is to make the sensor characterization experiment as efficient as possible, without sacrificing measurement performance. An example of obtained measurement results is given for 3 sensors fabricated at CMT. The work greatly facilitates small series production of pressure sensors and instruments, as well as research activities in the field of pressure sensors at CMT.",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
journal = "Proceedings of the International Semiconductor Conference, CAS",
title = "A Measurement Setup Enabling Automatic Characterization of Silicon Piezoresistive MEMS Pressure Sensors",
pages = "237-240",
doi = "10.1109/SMICND.2017.8101211"
}
Poljak, P., Frantlović, M., Smiljanić, M., Lazić, Ž., Jokić, I., Randjelović, D.,& Mitrovic, Z.. (2017). A Measurement Setup Enabling Automatic Characterization of Silicon Piezoresistive MEMS Pressure Sensors. in Proceedings of the International Semiconductor Conference, CAS
Institute of Electrical and Electronics Engineers Inc.., 237-240.
https://doi.org/10.1109/SMICND.2017.8101211
Poljak P, Frantlović M, Smiljanić M, Lazić Ž, Jokić I, Randjelović D, Mitrovic Z. A Measurement Setup Enabling Automatic Characterization of Silicon Piezoresistive MEMS Pressure Sensors. in Proceedings of the International Semiconductor Conference, CAS. 2017;:237-240.
doi:10.1109/SMICND.2017.8101211 .
Poljak, Predrag, Frantlović, Miloš, Smiljanić, Milče, Lazić, Žarko, Jokić, Ivana, Randjelović, Danijela, Mitrovic, Zoran, "A Measurement Setup Enabling Automatic Characterization of Silicon Piezoresistive MEMS Pressure Sensors" in Proceedings of the International Semiconductor Conference, CAS (2017):237-240,
https://doi.org/10.1109/SMICND.2017.8101211 . .
