A Measurement Setup Enabling Automatic Characterization of Silicon Piezoresistive MEMS Pressure Sensors
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In this paper a measurement setup is presented that enables automatic characterization of silicon piezoresistive MEMS pressure sensors. It is used for determination of the pressure and temperature dependences of sensor electrical parameters. Some of the equipment in the setup, and the software application that controls the process, are developed at the Center of Microelectronic Technologies (CMT). The main objective of the work is to make the sensor characterization experiment as efficient as possible, without sacrificing measurement performance. An example of obtained measurement results is given for 3 sensors fabricated at CMT. The work greatly facilitates small series production of pressure sensors and instruments, as well as research activities in the field of pressure sensors at CMT.
Keywords:MEMS sensor / pressure / measurement setup / characterization
Source:Proceedings of the International Semiconductor Conference, CAS, 2017, 237-240
- Institute of Electrical and Electronics Engineers Inc.