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Приказ резултата 1-6 од 1
(100) oriented Si substrate (1) |
anisotropic wet chemical etching (1) |
KOH (1) |
SiO2 microbridge (1) |
SiO2 microcantilever (1) |
TMAH (1) |
(100) oriented Si substrate (1) |
anisotropic wet chemical etching (1) |
KOH (1) |
SiO2 microbridge (1) |
SiO2 microcantilever (1) |
TMAH (1) |