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Modeling Noise and Stability of Affinity-Based MEMS, NEMS and NOEMS Sensors of Ternary Gas Mixtures
(Institute of Electrical and Electronics Engineers (IEEE), 2019)
We address noise and stability of adsorptionbased sensing of ternary gas mixtures in affinity-based MEMS, NEMS and NOEMS sensors. We investigate mechanisms of such chemical sensing in diverse industrial environments where ...