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Consideration of Thin Film Ionization Vacuum Pressure Sensor
(Society for Electronics, Telecommunications, Computers, Automatic Control and Nuclear Engineering, 2019)
A novel concept of vacuum pressure sensor based
on thin film technology is presented. The sensor is designed as
a 1 µm thick aluminium film patterned as a structure of
wedges facing each other along a sharp tip. The ...
Etched Parallelogram Patterns with Sides Along <100> and <n10> Directions in 25 wt % TMAH
(Society for Electronics, Telecommunications, Computers, Automatic Control and Nuclear Engineering, 2019)
In this paper, we present and analyze etching of
parallelogram patterns in the masking layer on a (100) silicon in
25 wt % TMAH water solution at the temperature of 80 0C. Sides
of parallelogram islands in the masking ...
Reversed ellipsoidal troughs sculpted in plasmonic multilayer nanomembranes
(Society for Electronics, Telecommunications, Computers, Automatic Control and Nuclear Engineering, 2019)
Nanomembranes represent a versatile novel
building block in micro- and nanoelectromechanical systems,
inspired by biological cell membranes. If built as quasi-2D
multilayer metal-dielectric nanocomposites, they represent ...