In this paper we present a high-performance, simple and low-cost method for simultaneous measurement of pressure and temperature using a single piezoresistive MEMS pressure sensor. The proposed measurement method utilizes the parasitic temperature sensitivity of the sensing element for both pressure measurement correction and temperature measurement. A parametric mathematical model of the sensor was established and its parameters were calculated using the obtained characterization data. Based on the model, a real-time sensor correction for both pressure and temperature measurements was implemented in a target measurement system. The proposed method was verified experimentally on a group of typical industrial-grade piezoresistive sensors. The obtained results indicate that the method enables the pressure measurement performance to exceed that of typical digital industrial pressure transmitters, achieving at the same time the temperature measurement performance comparable to industrial-g...rade platinum resistance temperature sensors. The presented work is directly applicable in industrial instrumentation, where it can add temperature measurement capability to the existing pressure measurement instruments, requiring little or no additional hardware, and without adverse effects on pressure measurement performance.
TY - JOUR
AU - Frantlović, Miloš
AU - Jokić, Ivana
AU - Lazić, Žarko
AU - Smiljanić, Milče
AU - Obradov, Marko
AU - Vukelic, Branko
AU - Jakšić, Zoran
AU - Stankovic, Srdan
PY - 2016
UR - https://cer.ihtm.bg.ac.rs/handle/123456789/1943
AB - In this paper we present a high-performance, simple and low-cost method for simultaneous measurement of pressure and temperature using a single piezoresistive MEMS pressure sensor. The proposed measurement method utilizes the parasitic temperature sensitivity of the sensing element for both pressure measurement correction and temperature measurement. A parametric mathematical model of the sensor was established and its parameters were calculated using the obtained characterization data. Based on the model, a real-time sensor correction for both pressure and temperature measurements was implemented in a target measurement system. The proposed method was verified experimentally on a group of typical industrial-grade piezoresistive sensors. The obtained results indicate that the method enables the pressure measurement performance to exceed that of typical digital industrial pressure transmitters, achieving at the same time the temperature measurement performance comparable to industrial-grade platinum resistance temperature sensors. The presented work is directly applicable in industrial instrumentation, where it can add temperature measurement capability to the existing pressure measurement instruments, requiring little or no additional hardware, and without adverse effects on pressure measurement performance.
PB - Iop Publishing Ltd, Bristol
T2 - Measurement Science and Technology
T1 - A method enabling simultaneous pressure and temperature measurement using a single piezoresistive MEMS pressure sensor
VL - 27
IS - 12
DO - 10.1088/0957-0233/27/12/125101
ER -
@article{
author = "Frantlović, Miloš and Jokić, Ivana and Lazić, Žarko and Smiljanić, Milče and Obradov, Marko and Vukelic, Branko and Jakšić, Zoran and Stankovic, Srdan",
year = "2016",
abstract = "In this paper we present a high-performance, simple and low-cost method for simultaneous measurement of pressure and temperature using a single piezoresistive MEMS pressure sensor. The proposed measurement method utilizes the parasitic temperature sensitivity of the sensing element for both pressure measurement correction and temperature measurement. A parametric mathematical model of the sensor was established and its parameters were calculated using the obtained characterization data. Based on the model, a real-time sensor correction for both pressure and temperature measurements was implemented in a target measurement system. The proposed method was verified experimentally on a group of typical industrial-grade piezoresistive sensors. The obtained results indicate that the method enables the pressure measurement performance to exceed that of typical digital industrial pressure transmitters, achieving at the same time the temperature measurement performance comparable to industrial-grade platinum resistance temperature sensors. The presented work is directly applicable in industrial instrumentation, where it can add temperature measurement capability to the existing pressure measurement instruments, requiring little or no additional hardware, and without adverse effects on pressure measurement performance.",
publisher = "Iop Publishing Ltd, Bristol",
journal = "Measurement Science and Technology",
title = "A method enabling simultaneous pressure and temperature measurement using a single piezoresistive MEMS pressure sensor",
volume = "27",
number = "12",
doi = "10.1088/0957-0233/27/12/125101"
}
Frantlović, M., Jokić, I., Lazić, Ž., Smiljanić, M., Obradov, M., Vukelic, B., Jakšić, Z.,& Stankovic, S.. (2016). A method enabling simultaneous pressure and temperature measurement using a single piezoresistive MEMS pressure sensor. in Measurement Science and Technology
Iop Publishing Ltd, Bristol., 27(12).
https://doi.org/10.1088/0957-0233/27/12/125101
Frantlović M, Jokić I, Lazić Ž, Smiljanić M, Obradov M, Vukelic B, Jakšić Z, Stankovic S. A method enabling simultaneous pressure and temperature measurement using a single piezoresistive MEMS pressure sensor. in Measurement Science and Technology. 2016;27(12).
doi:10.1088/0957-0233/27/12/125101 .
Frantlović, Miloš, Jokić, Ivana, Lazić, Žarko, Smiljanić, Milče, Obradov, Marko, Vukelic, Branko, Jakšić, Zoran, Stankovic, Srdan, "A method enabling simultaneous pressure and temperature measurement using a single piezoresistive MEMS pressure sensor" in Measurement Science and Technology, 27, no. 12 (2016),
https://doi.org/10.1088/0957-0233/27/12/125101 . .
