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dc.creatorFrantlović, Miloš
dc.creatorSmiljanić, Milče
dc.creatorLazić, Žarko
dc.date.accessioned2019-01-30T17:49:16Z
dc.date.available2019-01-30T17:49:16Z
dc.date.issued2016
dc.identifier.isbn978-1-5090-0748-6
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/1900
dc.description.abstractIn this paper we first describe the latest silicon piezoresistive MEMS pressure sensor developed and manufactured at the Center of Microelectronic Technologies (ICTM-CMT). We introduce the concept of intelligent industrial instrumentation, and present a method that enables simultaneous high-performance pressure and temperature measurement to be realized using the described sensor. Experimental verification of the method was performed using the intelligent industrial instrument platform developed at ICTM-CMT. The obtained results have been discussed. They indicate that it is possible to meet or exceeded the measurement performance of existing industrial-grade equipment by using the described approach. An important advantage of the method is that it can enable the temperature measurement capability to be added to some existing intelligent transmitters without hardware modifications. A new intelligent industrial liquid level transmitter, based on the described method and developed at IHTM-CMT, is also presented.en
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//
dc.rightsrestrictedAccess
dc.sourceProceedings of the 2016 4th International Symposium on Environmental Friendly Energies and Applicati
dc.subjectsensoren
dc.subjectMEMSen
dc.subjectpressureen
dc.subjectindustrial transmitteren
dc.titleIntelligent Industrial Measurement Instruments with Silicon Piezoresistive MEMS Pressure Sensorsen
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractФрантловић, Милош; Лазић, Жарко; Смиљанић, Милче;
dc.citation.other
dc.identifier.doi10.1109/EFEA.2016.7748819
dc.identifier.rcubConv_3645
dc.identifier.scopus2-s2.0-85006508405
dc.identifier.wos000390268800055
dc.type.versionpublishedVersion


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