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Joint effect of heterogeneous intrinsic noise sources on instability of MEMS resonators

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2015
1830.pdf (895.4Kb)
Authors
Jakšić, Olga
Jokić, Ivana
Frantlović, Miloš
Ranđelović, Danijela
Tanasković, Dragan
Lazić, Žarko
Vasiljević-Radović, Dana
Article (Published version)
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Abstract
This article's focus is on the numerical estimation of the overall instability of microelectromechanical-system-based (MEMS) resonators, caused by intrinsic noise mechanisms that are different in nature (electrical, mechanical or chemical). Heterogeneous intrinsic noise sources in MEMS resonators that have been addressed here are Johnson-Nyquist noise, 1/f noise, noise caused by temperature fluctuations and adsorption-desorption induced noise. Their models are given first (based on analytical modeling or based on empirical expressions with experimentally obtained parameters). Then it is shown how each one contributes to the phase noise, a unique figure of merit of resonators instability. Material dependent constants α and knee position in noise spectrum, needed for empirical formulae referring to 1/f noise, have been obtained experimentally, by measurements of noise of MEMS components produced in the Centre of Microelectronic Technologies of the Institute of Chemistry, Technology and M...etallurgy in Belgrade. According to these measurements, α varies in the range from 0.776.10-4 to 2.26.10-4 and cut off frequency for 1/f noise varies from 147 Hz to 1 kHz. The determined values are then used for the modeling of micro-resonator phase noise with electrical origin and overall phase noise of a micro-resonator. Numerical example for calculation of overall phase noise is given for a micro-cantilever, produced by the same technology as measured components. The outlined noise analysis can be easily extended and applied to noise analysis of MEMS resonator of an arbitrary shape.

Keywords:
1/f noise / Adsorption / Desorption / Intrinsic noise / Johnson noise / Micro cantilever / Nyquist noise / Phase noise / Power spectral density / Temperature fluctuations / Thermal noise / Thermo-mechanical nois
Source:
Electronics, 2015, 19, 2, 59-65
Publisher:
  • University of Banja Luka
Projects:
  • Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)

DOI: 10.7251/ELS1519059J

ISSN: 1450-5843

Scopus: 2-s2.0-84958185764
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URI
http://cer.ihtm.bg.ac.rs/handle/123456789/1832
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