Joint effect of heterogeneous intrinsic noise sources on instability of MEMS resonators

2015
Authors
Jakšić, Olga
Jokić, Ivana

Frantlović, Miloš

Randjelović, Danijela

Tanasković, Dragan

Lazić, Žarko

Vasiljević-Radović, Dana

Article (Published version)
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This article's focus is on the numerical estimation of the overall instability of microelectromechanical-system-based (MEMS) resonators, caused by intrinsic noise mechanisms that are different in nature (electrical, mechanical or chemical). Heterogeneous intrinsic noise sources in MEMS resonators that have been addressed here are Johnson-Nyquist noise, 1/f noise, noise caused by temperature fluctuations and adsorption-desorption induced noise. Their models are given first (based on analytical modeling or based on empirical expressions with experimentally obtained parameters). Then it is shown how each one contributes to the phase noise, a unique figure of merit of resonators instability. Material dependent constants α and knee position in noise spectrum, needed for empirical formulae referring to 1/f noise, have been obtained experimentally, by measurements of noise of MEMS components produced in the Centre of Microelectronic Technologies of the Institute of Chemistry, Technology and M...etallurgy in Belgrade. According to these measurements, α varies in the range from 0.776.10-4 to 2.26.10-4 and cut off frequency for 1/f noise varies from 147 Hz to 1 kHz. The determined values are then used for the modeling of micro-resonator phase noise with electrical origin and overall phase noise of a micro-resonator. Numerical example for calculation of overall phase noise is given for a micro-cantilever, produced by the same technology as measured components. The outlined noise analysis can be easily extended and applied to noise analysis of MEMS resonator of an arbitrary shape.
Keywords:
1/f noise / Adsorption / Desorption / Intrinsic noise / Johnson noise / Micro cantilever / Nyquist noise / Phase noise / Power spectral density / Temperature fluctuations / Thermal noise / Thermo-mechanical noisSource:
Electronics, 2015, 19, 2, 59-65Publisher:
- University of Banja Luka
Funding / projects:
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
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IHTMTY - JOUR AU - Jakšić, Olga AU - Jokić, Ivana AU - Frantlović, Miloš AU - Randjelović, Danijela AU - Tanasković, Dragan AU - Lazić, Žarko AU - Vasiljević-Radović, Dana PY - 2015 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/1832 AB - This article's focus is on the numerical estimation of the overall instability of microelectromechanical-system-based (MEMS) resonators, caused by intrinsic noise mechanisms that are different in nature (electrical, mechanical or chemical). Heterogeneous intrinsic noise sources in MEMS resonators that have been addressed here are Johnson-Nyquist noise, 1/f noise, noise caused by temperature fluctuations and adsorption-desorption induced noise. Their models are given first (based on analytical modeling or based on empirical expressions with experimentally obtained parameters). Then it is shown how each one contributes to the phase noise, a unique figure of merit of resonators instability. Material dependent constants α and knee position in noise spectrum, needed for empirical formulae referring to 1/f noise, have been obtained experimentally, by measurements of noise of MEMS components produced in the Centre of Microelectronic Technologies of the Institute of Chemistry, Technology and Metallurgy in Belgrade. According to these measurements, α varies in the range from 0.776.10-4 to 2.26.10-4 and cut off frequency for 1/f noise varies from 147 Hz to 1 kHz. The determined values are then used for the modeling of micro-resonator phase noise with electrical origin and overall phase noise of a micro-resonator. Numerical example for calculation of overall phase noise is given for a micro-cantilever, produced by the same technology as measured components. The outlined noise analysis can be easily extended and applied to noise analysis of MEMS resonator of an arbitrary shape. PB - University of Banja Luka T2 - Electronics T1 - Joint effect of heterogeneous intrinsic noise sources on instability of MEMS resonators VL - 19 IS - 2 SP - 59 EP - 65 DO - 10.7251/ELS1519059J ER -
@article{ author = "Jakšić, Olga and Jokić, Ivana and Frantlović, Miloš and Randjelović, Danijela and Tanasković, Dragan and Lazić, Žarko and Vasiljević-Radović, Dana", year = "2015", abstract = "This article's focus is on the numerical estimation of the overall instability of microelectromechanical-system-based (MEMS) resonators, caused by intrinsic noise mechanisms that are different in nature (electrical, mechanical or chemical). Heterogeneous intrinsic noise sources in MEMS resonators that have been addressed here are Johnson-Nyquist noise, 1/f noise, noise caused by temperature fluctuations and adsorption-desorption induced noise. Their models are given first (based on analytical modeling or based on empirical expressions with experimentally obtained parameters). Then it is shown how each one contributes to the phase noise, a unique figure of merit of resonators instability. Material dependent constants α and knee position in noise spectrum, needed for empirical formulae referring to 1/f noise, have been obtained experimentally, by measurements of noise of MEMS components produced in the Centre of Microelectronic Technologies of the Institute of Chemistry, Technology and Metallurgy in Belgrade. According to these measurements, α varies in the range from 0.776.10-4 to 2.26.10-4 and cut off frequency for 1/f noise varies from 147 Hz to 1 kHz. The determined values are then used for the modeling of micro-resonator phase noise with electrical origin and overall phase noise of a micro-resonator. Numerical example for calculation of overall phase noise is given for a micro-cantilever, produced by the same technology as measured components. The outlined noise analysis can be easily extended and applied to noise analysis of MEMS resonator of an arbitrary shape.", publisher = "University of Banja Luka", journal = "Electronics", title = "Joint effect of heterogeneous intrinsic noise sources on instability of MEMS resonators", volume = "19", number = "2", pages = "59-65", doi = "10.7251/ELS1519059J" }
Jakšić, O., Jokić, I., Frantlović, M., Randjelović, D., Tanasković, D., Lazić, Ž.,& Vasiljević-Radović, D.. (2015). Joint effect of heterogeneous intrinsic noise sources on instability of MEMS resonators. in Electronics University of Banja Luka., 19(2), 59-65. https://doi.org/10.7251/ELS1519059J
Jakšić O, Jokić I, Frantlović M, Randjelović D, Tanasković D, Lazić Ž, Vasiljević-Radović D. Joint effect of heterogeneous intrinsic noise sources on instability of MEMS resonators. in Electronics. 2015;19(2):59-65. doi:10.7251/ELS1519059J .
Jakšić, Olga, Jokić, Ivana, Frantlović, Miloš, Randjelović, Danijela, Tanasković, Dragan, Lazić, Žarko, Vasiljević-Radović, Dana, "Joint effect of heterogeneous intrinsic noise sources on instability of MEMS resonators" in Electronics, 19, no. 2 (2015):59-65, https://doi.org/10.7251/ELS1519059J . .