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dc.creatorFrantlović, Miloš
dc.creatorJokić, Ivana
dc.creatorLazić, Žarko
dc.creatorVukelić, Branko
dc.creatorObradov, Marko
dc.creatorVasiljević-Radović, Dana
dc.creatorStanković, Srđan
dc.date.accessioned2019-01-30T17:45:27Z
dc.date.available2019-01-30T17:45:27Z
dc.date.issued2015
dc.identifier.issn0353-3670
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/1714
dc.description.abstractTemperature and pressure are the most common parameters to be measured and monitored not only in industrial processes but in many other fields from vehicles and healthcare to household appliances. Silicon microelectromechanical (MEMS) piezoresistive pressure sensors are the first and the most successful MEMS sensors, offering high sensitivity, solid-state reliability and small dimensions at a low cost achieved by mass production. The inherent temperature dependence of the output signal of such sensors adversely affects their pressure measurement performance, necessitating the use of correction methods in a majority of cases. However, the same effect can be utilized for temperature measurement, thus enabling new sensor applications. In this paper we perform characterization of MEMS piezoresistive pressure sensors for temperature measurement, propose a sensor correction method, and demonstrate that the measurement error as low as ± 0.3 °C can be achieved.en
dc.publisherUniverzitet u Nišu
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//
dc.rightsopenAccess
dc.sourceFacta universitatis - series: Electronics and Energetics
dc.subjectMEMS sensoren
dc.subjecttemperature measurementen
dc.subjectsensor correctionen
dc.titleTemperature measurement performance of silicon piezoresistive MEMS pressure sensors for industrial applicationsen
dc.typearticle
dc.rights.licenseARR
dcterms.abstractФрантловић, Милош; Станковић, Срђан; Лазић, Жарко; Јокић, Ивана; Обрадов, Марко; Васиљевић-Радовић, Дана; Вукелић, Бранко;
dc.citation.volume28
dc.citation.issue1
dc.citation.spage123
dc.citation.epage131
dc.citation.other28(1): 123-131
dc.citation.rankM24
dc.identifier.doi10.2298/FUEE1501123F
dc.identifier.rcubConv_333
dc.identifier.fulltexthttp://cer.ihtm.bg.ac.rs//bitstream/id/8161/1712.pdf
dc.type.versionpublishedVersion


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