ЦЕР - Централни Репозиторијум ИХТМ-а
Институт за хемију, технологију и металургију
    • English
    • Српски
    • Српски (Serbia)
  • Српски (ћирилица) 
    • Енглески
    • Српски (ћирилица)
    • Српски (латиница)
  • Пријава
Преглед рада 
  •   ЦЕР - Централни репозиторијум ИХТМ-а
  • IHTM
  • Radovi istraživača / Researchers' publications
  • Преглед рада
  •   ЦЕР - Централни репозиторијум ИХТМ-а
  • IHTM
  • Radovi istraživača / Researchers' publications
  • Преглед рада
JavaScript is disabled for your browser. Some features of this site may not work without it.

Temperature measurement performance of silicon piezoresistive MEMS pressure sensors for industrial applications

Thumbnail
2015
1712.pdf (637.5Kb)
Аутори
Frantlović, Miloš
Jokić, Ivana
Lazić, Žarko
Vukelić, Branko
Obradov, Marko
Vasiljević-Radović, Dana
Stanković, Srđan
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документу
Апстракт
Temperature and pressure are the most common parameters to be measured and monitored not only in industrial processes but in many other fields from vehicles and healthcare to household appliances. Silicon microelectromechanical (MEMS) piezoresistive pressure sensors are the first and the most successful MEMS sensors, offering high sensitivity, solid-state reliability and small dimensions at a low cost achieved by mass production. The inherent temperature dependence of the output signal of such sensors adversely affects their pressure measurement performance, necessitating the use of correction methods in a majority of cases. However, the same effect can be utilized for temperature measurement, thus enabling new sensor applications. In this paper we perform characterization of MEMS piezoresistive pressure sensors for temperature measurement, propose a sensor correction method, and demonstrate that the measurement error as low as ± 0.3 °C can be achieved.
Кључне речи:
MEMS sensor / temperature measurement / sensor correction
Извор:
Facta universitatis - series: Electronics and Energetics, 2015, 28, 1, 123-131
Издавач:
  • Univerzitet u Nišu
Пројекти:
  • Микро, нано-системи и сензори за примену у електропривреди, процесној индустрији и заштити животне средине (RS-32008)

DOI: 10.2298/FUEE1501123F

ISSN: 0353-3670

WoS: 000421919300009

[ Google Scholar ]
5
URI
http://cer.ihtm.bg.ac.rs/handle/123456789/1714
Колекције
  • Radovi istraživača / Researchers' publications
Институција
IHTM
TY  - JOUR
AU  - Frantlović, Miloš
AU  - Jokić, Ivana
AU  - Lazić, Žarko
AU  - Vukelić, Branko
AU  - Obradov, Marko
AU  - Vasiljević-Radović, Dana
AU  - Stanković, Srđan
PY  - 2015
UR  - http://cer.ihtm.bg.ac.rs/handle/123456789/1714
AB  - Temperature and pressure are the most common parameters to be measured and monitored not only in industrial processes but in many other fields from vehicles and healthcare to household appliances. Silicon microelectromechanical (MEMS) piezoresistive pressure sensors are the first and the most successful MEMS sensors, offering high sensitivity, solid-state reliability and small dimensions at a low cost achieved by mass production. The inherent temperature dependence of the output signal of such sensors adversely affects their pressure measurement performance, necessitating the use of correction methods in a majority of cases. However, the same effect can be utilized for temperature measurement, thus enabling new sensor applications. In this paper we perform characterization of MEMS piezoresistive pressure sensors for temperature measurement, propose a sensor correction method, and demonstrate that the measurement error as low as ± 0.3 °C can be achieved.
PB  - Univerzitet u Nišu
T2  - Facta universitatis - series: Electronics and Energetics
T1  - Temperature measurement performance of silicon piezoresistive MEMS pressure sensors for industrial applications
VL  - 28
IS  - 1
SP  - 123
EP  - 131
DO  - 10.2298/FUEE1501123F
ER  - 
@article{
author = "Frantlović, Miloš and Jokić, Ivana and Lazić, Žarko and Vukelić, Branko and Obradov, Marko and Vasiljević-Radović, Dana and Stanković, Srđan",
year = "2015",
url = "http://cer.ihtm.bg.ac.rs/handle/123456789/1714",
abstract = "Temperature and pressure are the most common parameters to be measured and monitored not only in industrial processes but in many other fields from vehicles and healthcare to household appliances. Silicon microelectromechanical (MEMS) piezoresistive pressure sensors are the first and the most successful MEMS sensors, offering high sensitivity, solid-state reliability and small dimensions at a low cost achieved by mass production. The inherent temperature dependence of the output signal of such sensors adversely affects their pressure measurement performance, necessitating the use of correction methods in a majority of cases. However, the same effect can be utilized for temperature measurement, thus enabling new sensor applications. In this paper we perform characterization of MEMS piezoresistive pressure sensors for temperature measurement, propose a sensor correction method, and demonstrate that the measurement error as low as ± 0.3 °C can be achieved.",
publisher = "Univerzitet u Nišu",
journal = "Facta universitatis - series: Electronics and Energetics",
title = "Temperature measurement performance of silicon piezoresistive MEMS pressure sensors for industrial applications",
volume = "28",
number = "1",
pages = "123-131",
doi = "10.2298/FUEE1501123F"
}
Frantlović M, Jokić I, Lazić Ž, Vukelić B, Obradov M, Vasiljević-Radović D, Stanković S. Temperature measurement performance of silicon piezoresistive MEMS pressure sensors for industrial applications. Facta universitatis - series: Electronics and Energetics. 2015;28(1):123-131
Frantlović, M., Jokić, I., Lazić, Ž., Vukelić, B., Obradov, M., Vasiljević-Radović, D.,& Stanković, S. (2015). Temperature measurement performance of silicon piezoresistive MEMS pressure sensors for industrial applications.
Facta universitatis - series: Electronics and EnergeticsUniverzitet u Nišu., 28(1), 123-131.
https://doi.org/10.2298/FUEE1501123F
Frantlović Miloš, Jokić Ivana, Lazić Žarko, Vukelić Branko, Obradov Marko, Vasiljević-Radović Dana, Stanković Srđan, "Temperature measurement performance of silicon piezoresistive MEMS pressure sensors for industrial applications" 28, no. 1 (2015):123-131,
https://doi.org/10.2298/FUEE1501123F .

DSpace software copyright © 2002-2015  DuraSpace
О Централном репозиторијуму (ЦеР) | Пошаљите запажања

OpenAIRERCUB
 

 

Комплетан репозиторијумИнституцијеАуториНасловиТемеОва институцијаАуториНасловиТеме

Статистика

Преглед статистика

DSpace software copyright © 2002-2015  DuraSpace
О Централном репозиторијуму (ЦеР) | Пошаљите запажања

OpenAIRERCUB