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dc.creatorTodorović, D. M.
dc.creatorRabasovic, M D
dc.creatorMarkushev, D D
dc.creatorJović, Vesna
dc.creatorRadulović, Katarina
dc.creatorSarajlić, Milija
dc.date.accessioned2019-01-30T17:44:07Z
dc.date.available2019-01-30T17:44:07Z
dc.date.issued2015
dc.identifier.issn0195-928X
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/1652
dc.description.abstractPhotoacoustic (PA) elastic bending effects have been studied and used to develop the experimental non-contact and non-destructive method that make it possible to investigate the optical, thermal, and elastic properties of thin films. A theoretical model for optically excited thin films on a Si membrane, which includes plasmaelastic, thermoelastic, and thermodiffusion mechanisms, is given. Relations for the PA elastic bending signal in the optically excited two-layer Si membrane are derived. The method was verified by measuring the experimental amplitude and phase of the PA elastic bending of the thin film on Si square membranes and compared with the theoretically calculated spectra. The analysis shows that it is possible to obtain the optical, thermal, and elastic parameters of a film thinner than 1 mu m.en
dc.publisherSpringer/Plenum Publishers, New York
dc.relationinfo:eu-repo/grantAgreement/MESTD/Basic Research (BR or ON)/171016/RS//
dc.rightsrestrictedAccess
dc.sourceInternational Journal of Thermophysics
dc.subjectElastic bendingen
dc.subjectMembraneen
dc.subjectPhotoacousticen
dc.subjectPlasmaelasticen
dc.subjectThermoelasticen
dc.subjectThin filmen
dc.titlePhotoacoustic Elastic Bending Method: Characterization of Thin Films on Silicon Membranesen
dc.typearticle
dc.rights.licenseARR
dcterms.abstractТодоровиц, Д М; Радуловић, Катарина; Сарајлић, Милија; Рабасовиц, М Д; Маркусхев, Д Д; Јовић, Весна;
dc.citation.volume36
dc.citation.issue5-6
dc.citation.spage1016
dc.citation.epage1028
dc.citation.other36(5-6): 1016-1028
dc.citation.rankM23
dc.identifier.doi10.1007/s10765-014-1801-3
dc.identifier.rcubConv_3355
dc.identifier.scopus2-s2.0-84931563893
dc.identifier.wos000356611100029
dc.type.versionpublishedVersion


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