Resonant frequency and phase noise of nanoelectromechanical oscillators based on two-dimensional crystal resonators

Abstract

This study presents a theoretical analysis of one of the most promising nanoelectromechanical (NEMS) components - A NEMS oscillator. The analyzed oscillator contains a stretched circular plate, fabricated of two-dimensional crystals (graphene, bBN, MoS2 etc.), as a resonator. The calculation of resonant frequency based on the classical continuum theory of plates and membranes is presented, and then the phase noise theory of the oscillators using a circular plate as a frequency determining element. We assume that thermal and 1/f noise are present in the oscillator circuit. A satisfactory agreement is obtained between our calculations and recent experimental literature data for graphene.