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Intelligent thermal vacuum sensors based on multipurpose thermopile MEMS chips

Samo za registrovane korisnike
2014
Autori
Ranđelović, Danijela
Frantlović, Miloš
Miljkovic, Budimir L.
Popović, Bogdan
Jakšić, Zoran
Članak u časopisu (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentu
Apstrakt
Realization of intelligent thermal vacuum sensors based on multipurpose thermopile micro-electromechanical (MEMS) chips is presented in this work. These vacuum sensors satisfy the main requirements for contemporary sensors, they are cost-effective in both fabrication and operation, and simple to use. Intelligent devices based on two types of thermal sensors, A-type with Al heater, and Ptype with p(+)Si heater, were developed. Both types have two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The intelligent functionality is achieved by using a signal processing unit the authors developed earlier for pressure sensing based on their proprietary Si piezoresistive pressure sensing elements. The main issues which were of key importance for realization of intelligent vacuum sensors are addressed in this work: design and fabrication of the intelligent vacuum sensors, adaptation of the s...oftware module, linearization of the input signal using digital signal processing and temperature compensation. A three-udstage test procedure is presented. The A-type sensor, with a thinner membrane, achieved 19 times better thermopile voltage-pressure sensitivity compared with the P-type sensor, with a thicker membrane. Since the estimated noise level of the measuring system is comparable with the useful signal of the Ptype device, the improved voltage-pressure sensitivity provides a better resolution and signal to noise ratio of the intelligent vacuum measuring system.

Ključne reči:
Thermopile / Vacuum sensor / Intelligent sensor / Pressure measurement / Digital signal processing
Izvor:
Vacuum, 2014, 101, 118-124
Izdavač:
  • Pergamon-Elsevier Science Ltd, Oxford
Projekti:
  • Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-32008)
  • Reinforcement of Regional Microsystems and Nanosystems Centre (EU-205533)

DOI: 10.1016/j.vacuum.2013.07.044

ISSN: 0042-207X

WoS: 000330143000022

Scopus: 2-s2.0-84883860148
[ Google Scholar ]
14
URI
http://cer.ihtm.bg.ac.rs/handle/123456789/1533
Kolekcije
  • Radovi istraživača / Researchers' publications
Institucija
IHTM
TY  - JOUR
AU  - Ranđelović, Danijela
AU  - Frantlović, Miloš
AU  - Miljkovic, Budimir L.
AU  - Popović, Bogdan
AU  - Jakšić, Zoran
PY  - 2014
UR  - http://cer.ihtm.bg.ac.rs/handle/123456789/1533
AB  - Realization of intelligent thermal vacuum sensors based on multipurpose thermopile micro-electromechanical (MEMS) chips is presented in this work. These vacuum sensors satisfy the main requirements for contemporary sensors, they are cost-effective in both fabrication and operation, and simple to use. Intelligent devices based on two types of thermal sensors, A-type with Al heater, and Ptype with p(+)Si heater, were developed. Both types have two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The intelligent functionality is achieved by using a signal processing unit the authors developed earlier for pressure sensing based on their proprietary Si piezoresistive pressure sensing elements. The main issues which were of key importance for realization of intelligent vacuum sensors are addressed in this work: design and fabrication of the intelligent vacuum sensors, adaptation of the software module, linearization of the input signal using digital signal processing and temperature compensation. A three-udstage test procedure is presented. The A-type sensor, with a thinner membrane, achieved 19 times better thermopile voltage-pressure sensitivity compared with the P-type sensor, with a thicker membrane. Since the estimated noise level of the measuring system is comparable with the useful signal of the Ptype device, the improved voltage-pressure sensitivity provides a better resolution and signal to noise ratio of the intelligent vacuum measuring system.
PB  - Pergamon-Elsevier Science Ltd, Oxford
T2  - Vacuum
T1  - Intelligent thermal vacuum sensors based on multipurpose thermopile MEMS chips
VL  - 101
SP  - 118
EP  - 124
DO  - 10.1016/j.vacuum.2013.07.044
ER  - 
@article{
author = "Ranđelović, Danijela and Frantlović, Miloš and Miljkovic, Budimir L. and Popović, Bogdan and Jakšić, Zoran",
year = "2014",
url = "http://cer.ihtm.bg.ac.rs/handle/123456789/1533",
abstract = "Realization of intelligent thermal vacuum sensors based on multipurpose thermopile micro-electromechanical (MEMS) chips is presented in this work. These vacuum sensors satisfy the main requirements for contemporary sensors, they are cost-effective in both fabrication and operation, and simple to use. Intelligent devices based on two types of thermal sensors, A-type with Al heater, and Ptype with p(+)Si heater, were developed. Both types have two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The intelligent functionality is achieved by using a signal processing unit the authors developed earlier for pressure sensing based on their proprietary Si piezoresistive pressure sensing elements. The main issues which were of key importance for realization of intelligent vacuum sensors are addressed in this work: design and fabrication of the intelligent vacuum sensors, adaptation of the software module, linearization of the input signal using digital signal processing and temperature compensation. A three-udstage test procedure is presented. The A-type sensor, with a thinner membrane, achieved 19 times better thermopile voltage-pressure sensitivity compared with the P-type sensor, with a thicker membrane. Since the estimated noise level of the measuring system is comparable with the useful signal of the Ptype device, the improved voltage-pressure sensitivity provides a better resolution and signal to noise ratio of the intelligent vacuum measuring system.",
publisher = "Pergamon-Elsevier Science Ltd, Oxford",
journal = "Vacuum",
title = "Intelligent thermal vacuum sensors based on multipurpose thermopile MEMS chips",
volume = "101",
pages = "118-124",
doi = "10.1016/j.vacuum.2013.07.044"
}
Ranđelović D, Frantlović M, Miljkovic BL, Popović B, Jakšić Z. Intelligent thermal vacuum sensors based on multipurpose thermopile MEMS chips. Vacuum. 2014;101:118-124
Ranđelović, D., Frantlović, M., Miljkovic, B. L., Popović, B.,& Jakšić, Z. (2014). Intelligent thermal vacuum sensors based on multipurpose thermopile MEMS chips.
VacuumPergamon-Elsevier Science Ltd, Oxford., 101, 118-124.
https://doi.org/10.1016/j.vacuum.2013.07.044
Ranđelović Danijela, Frantlović Miloš, Miljkovic Budimir L., Popović Bogdan, Jakšić Zoran, "Intelligent thermal vacuum sensors based on multipurpose thermopile MEMS chips" 101 (2014):118-124,
https://doi.org/10.1016/j.vacuum.2013.07.044 .

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