Приказ основних података о документу

dc.creatorFrantlović, Miloš
dc.creatorJokić, Ivana
dc.creatorLazić, Žarko
dc.creatorVukelic, B.
dc.creatorObradov, Marko
dc.creatorVasiljević-Radović, Dana
dc.date.accessioned2019-01-30T17:39:54Z
dc.date.available2019-01-30T17:39:54Z
dc.date.issued2014
dc.identifier.issn2159-1660
dc.identifier.urihttps://cer.ihtm.bg.ac.rs/handle/123456789/1452
dc.description.abstractIn industrial processes, as well as in many other fields from vehicles to healthcare, temperature and pressure are the most common parameters to be measured and monitored. Silicon microelectromechanical (MEMS) piezoresistive pressure sensors are the first and the most successful MEMS sensors, widely used in the industry in various measurement configurations. The inherent temperature dependence of the output signal of such sensors adversely affects their pressure measurement performance. However, it can be utilized for temperature measurement, thus enabling new sensor applications. In this paper a method is presented for temperature measurement using MEMS piezoresistive pressure sensors.en
dc.publisherInstitute of Electrical and Electronics Engineers Inc.
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//
dc.rightsrestrictedAccess
dc.sourceProceedings of the International Conference on Microelectronics, ICM
dc.titleTemperature Measurement Using Silicon Piezoresistive MEMS Pressure Sensorsen
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractВукелиц, Б.; Васиљевић-Радовић, Дана; Обрадов, Марко; Лазић, Жарко; Франтловић, Милош; Јокић, Ивана;
dc.citation.spage159
dc.citation.epage161
dc.citation.other: 159-161
dc.identifier.doi10.1109/MIEL.2014.6842110
dc.identifier.scopus2-s2.0-84904619057
dc.identifier.wos000360788600030
dc.type.versionpublishedVersion


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Приказ основних података о документу