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Prevention of Convex Corner Undercutting in Fabrication of Silicon Microcantilevers by Wet Anisotropic Etching
dc.creator | Jović, Vesna | |
dc.creator | Lamovec, Jelena | |
dc.creator | Mladenović, Ivana | |
dc.creator | Smiljanić, Milče | |
dc.creator | Popović, Bogdan | |
dc.date.accessioned | 2019-01-30T17:39:53Z | |
dc.date.available | 2019-01-30T17:39:53Z | |
dc.date.issued | 2014 | |
dc.identifier.issn | 2159-1660 | |
dc.identifier.uri | https://cer.ihtm.bg.ac.rs/handle/123456789/1451 | |
dc.description.abstract | This paper presents microcantilever fabrication on {100} oriented Si substrate using bulk micromachining technique. Detailed characteristics of convex corner compensation design for {100} oriented beam for two etching solutions: 25 wt. % TMAH and 30 wt. % KOH water solutions at 80 degrees C are given. | en |
dc.publisher | Institute of Electrical and Electronics Engineers Inc. | |
dc.relation | info:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS// | |
dc.rights | restrictedAccess | |
dc.source | Proceedings of the International Conference on Microelectronics, ICM | |
dc.title | Prevention of Convex Corner Undercutting in Fabrication of Silicon Microcantilevers by Wet Anisotropic Etching | en |
dc.type | conferenceObject | |
dc.rights.license | ARR | |
dcterms.abstract | Поповић, Богдан; Младеновић, Ивана; Смиљанић, Милче; Јовић, Весна; Ламовец, Јелена; | |
dc.citation.spage | 163 | |
dc.citation.epage | 166 | |
dc.citation.other | : 163-166 | |
dc.identifier.doi | 10.1109/MIEL.2014.6842111 | |
dc.identifier.scopus | 2-s2.0-84904704435 | |
dc.identifier.wos | 000360788600031 | |
dc.type.version | publishedVersion |