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dc.creatorRanđelović, Danijela
dc.creatorKozlov, A. G.
dc.creatorJakšić, Olga
dc.date.accessioned2019-01-30T17:39:51Z
dc.date.available2019-01-30T17:39:51Z
dc.date.issued2014
dc.identifier.issn2159-1660
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/1448
dc.description.abstractIn this paper we propose a novel operating principle for thermal vacuum sensor. The sensor considered in this work consists of thermopiles and thermally isolating membrane structure. The operating principle of such sensor would be based on monitoring thermal time constant dependence on pressure. In order to get the most prominent effect, sensor fabricated on SOI wafer is studied. Simulation was performed using 1D analytical model. It is shown that sensors performance could be improved by increasing the number of thermocouples. Apart from that it is demonstrated that performance of such sensor depends also on gas present in the housing so the same device could be also used as a gas type detector.en
dc.publisherInstitute of Electrical and Electronics Engineers Inc.
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//
dc.rightsrestrictedAccess
dc.sourceProceedings of the International Conference on Microelectronics, ICM
dc.titleVacuum Sensing Based on the Influence of Gas Pressure on Thermal Time Constanten
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractКозлов, A. Г.; Јакшић, Олга; Ранђеловић, Данијела;
dc.citation.spage179
dc.citation.epage182
dc.citation.other: 179-182
dc.identifier.doi10.1109/MIEL.2014.6842115
dc.identifier.rcubConv_3406
dc.identifier.scopus2-s2.0-84904687944
dc.identifier.wos000360788600035
dc.type.versionpublishedVersion


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