In this paper we propose a novel operating principle for thermal vacuum sensor. The sensor considered in this work consists of thermopiles and thermally isolating membrane structure. The operating principle of such sensor would be based on monitoring thermal time constant dependence on pressure. In order to get the most prominent effect, sensor fabricated on SOI wafer is studied. Simulation was performed using 1D analytical model. It is shown that sensors performance could be improved by increasing the number of thermocouples. Apart from that it is demonstrated that performance of such sensor depends also on gas present in the housing so the same device could be also used as a gas type detector.
Source:
Proceedings of the International Conference on Microelectronics, ICM, 2014, 179-182
Publisher:
Institute of Electrical and Electronics Engineers Inc.
TY - CONF
AU - Randjelović, Danijela
AU - Kozlov, A. G.
AU - Jakšić, Olga
PY - 2014
UR - https://cer.ihtm.bg.ac.rs/handle/123456789/1448
AB - In this paper we propose a novel operating principle for thermal vacuum sensor. The sensor considered in this work consists of thermopiles and thermally isolating membrane structure. The operating principle of such sensor would be based on monitoring thermal time constant dependence on pressure. In order to get the most prominent effect, sensor fabricated on SOI wafer is studied. Simulation was performed using 1D analytical model. It is shown that sensors performance could be improved by increasing the number of thermocouples. Apart from that it is demonstrated that performance of such sensor depends also on gas present in the housing so the same device could be also used as a gas type detector.
PB - Institute of Electrical and Electronics Engineers Inc.
C3 - Proceedings of the International Conference on Microelectronics, ICM
T1 - Vacuum Sensing Based on the Influence of Gas Pressure on Thermal Time Constant
SP - 179
EP - 182
DO - 10.1109/MIEL.2014.6842115
ER -
@conference{
author = "Randjelović, Danijela and Kozlov, A. G. and Jakšić, Olga",
year = "2014",
abstract = "In this paper we propose a novel operating principle for thermal vacuum sensor. The sensor considered in this work consists of thermopiles and thermally isolating membrane structure. The operating principle of such sensor would be based on monitoring thermal time constant dependence on pressure. In order to get the most prominent effect, sensor fabricated on SOI wafer is studied. Simulation was performed using 1D analytical model. It is shown that sensors performance could be improved by increasing the number of thermocouples. Apart from that it is demonstrated that performance of such sensor depends also on gas present in the housing so the same device could be also used as a gas type detector.",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
journal = "Proceedings of the International Conference on Microelectronics, ICM",
title = "Vacuum Sensing Based on the Influence of Gas Pressure on Thermal Time Constant",
pages = "179-182",
doi = "10.1109/MIEL.2014.6842115"
}
Randjelović, D., Kozlov, A. G.,& Jakšić, O.. (2014). Vacuum Sensing Based on the Influence of Gas Pressure on Thermal Time Constant. in Proceedings of the International Conference on Microelectronics, ICM
Institute of Electrical and Electronics Engineers Inc.., 179-182.
https://doi.org/10.1109/MIEL.2014.6842115
Randjelović D, Kozlov AG, Jakšić O. Vacuum Sensing Based on the Influence of Gas Pressure on Thermal Time Constant. in Proceedings of the International Conference on Microelectronics, ICM. 2014;:179-182.
doi:10.1109/MIEL.2014.6842115 .
Randjelović, Danijela, Kozlov, A. G., Jakšić, Olga, "Vacuum Sensing Based on the Influence of Gas Pressure on Thermal Time Constant" in Proceedings of the International Conference on Microelectronics, ICM (2014):179-182,
https://doi.org/10.1109/MIEL.2014.6842115 . .
