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dc.creatorTodorović, D. M.
dc.creatorMarkushev, D.D.
dc.creatorRabasović, M.D.
dc.creatorRadulović, Katarina
dc.creatorJović, Vesna
dc.date.accessioned2019-01-30T17:33:23Z
dc.date.available2019-01-30T17:33:23Z
dc.date.issued2012
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/1141
dc.description.abstractPhotoacoustic (PA) amplitude and phase spectra vs the modulation frequency of the excitation optical beam were measured and analyzed by PA elastic bending method. The PA spectra were measured in a frequency range (from 20 to 20000 Hz), for different thicknesses of Si rectangular membranes (from 10 to 100 m) The elastic characteristics of the Si chip with square membranes were described by the theory of thin elastic plate, i.e. as an elastic simply supported rectangular plate. The PA signals (sum of the thermodiffusion, thermoelastic and electronic deformation components) were calculated and compared with the experimental ones. These results showed that the PA elastic bending spectra are convenient for investigation the characteristics of micromechanical membraines. The PA elastic bending spectra of the optically driven micro-opto-electro- mechanical systems (MOEMS) enable, for example, to investigate the different electronic and thermal transport characteristics or technological processes in MEMS fabrications, etc.en
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//
dc.relationinfo:eu-repo/grantAgreement/MESTD/Basic Research (BR or ON)/171016/RS//
dc.rightsrestrictedAccess
dc.source28th International Conference on Microelectronics - Proceedings, MIEL 2012
dc.titlePhotoacoustic elastic bending method: Study of the silicon membranesen
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractМаркусхев, Д.Д.; Тодоровић, Д.М.; Јовић, Весна; Радуловић, Катарина; Рабасовић, М.Д.;
dc.citation.spage169
dc.citation.epage172
dc.citation.other: 169-172
dc.identifier.doi10.1109/MIEL.2012.6222825
dc.identifier.rcubConv_4297
dc.identifier.scopus2-s2.0-84864260657
dc.type.versionpublishedVersion


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