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dc.creatorĐurić, Zoran G.
dc.creatorRadulović, Katarina
dc.creatorJokić, Ivana
dc.creatorFrantlović, Miloš
dc.date.accessioned2019-01-30T17:33:21Z
dc.date.available2019-01-30T17:33:21Z
dc.date.issued2012
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/1139
dc.description.abstractCharacterization of adsorption-desorption (AD) processes of gas particles on semiconductors is necessary in order to investigate the influence of these processes on the micro/nano-devices performance. By applying a numerical computational method we determined the pressure dependence of the equilibrium coverage of the semiconductor surface by chemisorbed gas particles. We concluded that the pressure dependence of the total coverage of the surface by adparticles, and also of coverages by both the neutral and ionized adparticles, can be obtained by measuring the adsorbed mass. We propose the use of nanocantilever sensors for such extremely sensitive mass measurements. The obtained adsorption induced cantilever's resonant frequency shifts are higher than the detection threshold set by the termomechanical noise. This confirms the applicability of the used nanocantilever sensor for experimental characterization of AD processes at semiconductor surfaces.en
dc.relationinfo:eu-repo/grantAgreement/EC/FP7/205533/EU//
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//
dc.rightsopenAccess
dc.source28th International Conference on Microelectronics - Proceedings, MIEL 2012
dc.titleCharacterization of adsorption-desorption processes on semiconductor surfaces using nanocantilever mass sensorsen
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractЈокић, Ивана; Радуловић, Катарина; Ђурић, Зоран Г.; Франтловић, Милош;
dc.citation.spage161
dc.citation.epage164
dc.citation.other: 161-164
dc.identifier.doi10.1109/MIEL.2012.6222823
dc.identifier.rcubConv_4291
dc.identifier.fulltexthttp://cer.ihtm.bg.ac.rs/bitstream/id/14917/Djuric_28MIEL2012.pdf
dc.identifier.scopus2-s2.0-84864227934
dc.type.versionpublishedVersion


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