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dc.creatorTodorović, D. M.
dc.creatorRabasovic, M. D.
dc.creatorMarkushev, D. D.
dc.creatorJović, Vesna
dc.creatorRadulović, Katarina
dc.date.accessioned2019-01-30T17:32:56Z
dc.date.available2019-01-30T17:32:56Z
dc.date.issued2012
dc.identifier.issn0195-928X
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/1120
dc.description.abstractPhotoacoustic (PA) and photothermal (PT) science and technology extensively developed new methods for the investigation of micro (nano)-mechanical structures. PA and PT effects can be important also as driven mechanisms for optically excited micromechanical structures. The photoacoustic elastic bending method (PA-EBM) is based on the optical excitation of the micromechanical structure and detection of the acoustic response (PA signal) with a very sensitive PA detection system. The experimental PA elastic bending signals of the whole micromechanical structure were measured by using a special constructed PA cell (the gas-microphone detection technique with transmission configuration). The PA amplitude and phase spectra were measured, as a function of the modulation frequency in a frequency range from 20 Hz to 20 000 Hz, for different samples (Si chip with square membrane). The electronic and thermal elastic PA effects (electronic deformation and thermoelastic mechanisms of elastic wave generation) in a Si simply supported rectangular plate (3D geometry), photogenerated by a uniform and intensity-modulated optical beam, were studied. The theoretical model for the PA elastic bending frequency distribution by using the Green function method was given. The amplitude and phase PA signals were calculated and analyzed, including the thermalization and surface and volume recombination heat sources. The theoretical results were compared with experimental data.en
dc.publisherSpringer/Plenum Publishers, New York
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//
dc.relationinfo:eu-repo/grantAgreement/MESTD/Basic Research (BR or ON)/171016/RS//
dc.rightsrestrictedAccess
dc.sourceInternational Journal of Thermophysics
dc.subjectElastic bendingen
dc.subjectElectronic deformationen
dc.subjectMembranesen
dc.subjectMicromechanical structuresen
dc.subjectPhotoacousticen
dc.subjectPhotothermalen
dc.subjectThermoelasticen
dc.titleInvestigation of Micromechanical Structures by Photoacoustic Elastic Bending Methoden
dc.typearticle
dc.rights.licenseARR
dcterms.abstractРабасовиц, М. Д.; Маркусхев, Д. Д.; Радуловић, Катарина; Јовић, Весна; Тодоровиц, Д. М.;
dc.citation.volume33
dc.citation.issue10-11
dc.citation.spage2222
dc.citation.epage2229
dc.citation.other33(10-11): 2222-2229
dc.citation.rankM23
dc.identifier.doi10.1007/s10765-012-1242-9
dc.identifier.rcubConv_2884
dc.identifier.scopus2-s2.0-84888389549
dc.identifier.wos000312072300065
dc.type.versionpublishedVersion


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