Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method
Samo za registrovane korisnike
2012
Članak u časopisu (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
Photoacoustic (PA) and photothermal (PT) science and technology extensively developed new methods for the investigation of micro (nano)-mechanical structures. PA and PT effects can be important also as driven mechanisms for optically excited micromechanical structures. The photoacoustic elastic bending method (PA-EBM) is based on the optical excitation of the micromechanical structure and detection of the acoustic response (PA signal) with a very sensitive PA detection system. The experimental PA elastic bending signals of the whole micromechanical structure were measured by using a special constructed PA cell (the gas-microphone detection technique with transmission configuration). The PA amplitude and phase spectra were measured, as a function of the modulation frequency in a frequency range from 20 Hz to 20 000 Hz, for different samples (Si chip with square membrane). The electronic and thermal elastic PA effects (electronic deformation and thermoelastic mechanisms of elastic wave g...eneration) in a Si simply supported rectangular plate (3D geometry), photogenerated by a uniform and intensity-modulated optical beam, were studied. The theoretical model for the PA elastic bending frequency distribution by using the Green function method was given. The amplitude and phase PA signals were calculated and analyzed, including the thermalization and surface and volume recombination heat sources. The theoretical results were compared with experimental data.
Ključne reči:
Elastic bending / Electronic deformation / Membranes / Micromechanical structures / Photoacoustic / Photothermal / ThermoelasticIzvor:
International Journal of Thermophysics, 2012, 33, 10-11, 2222-2229Izdavač:
- Springer/Plenum Publishers, New York
Finansiranje / projekti:
- Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-32008)
- Atomski sudarni procesi i fotoakustička spektrometrija molekula i čvrstih tela (RS-171016)
DOI: 10.1007/s10765-012-1242-9
ISSN: 0195-928X
WoS: 000312072300065
Scopus: 2-s2.0-84888389549
Institucija/grupa
IHTMTY - JOUR AU - Todorović, D. M. AU - Rabasovic, M. D. AU - Markushev, D. D. AU - Jović, Vesna AU - Radulović, Katarina PY - 2012 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/1120 AB - Photoacoustic (PA) and photothermal (PT) science and technology extensively developed new methods for the investigation of micro (nano)-mechanical structures. PA and PT effects can be important also as driven mechanisms for optically excited micromechanical structures. The photoacoustic elastic bending method (PA-EBM) is based on the optical excitation of the micromechanical structure and detection of the acoustic response (PA signal) with a very sensitive PA detection system. The experimental PA elastic bending signals of the whole micromechanical structure were measured by using a special constructed PA cell (the gas-microphone detection technique with transmission configuration). The PA amplitude and phase spectra were measured, as a function of the modulation frequency in a frequency range from 20 Hz to 20 000 Hz, for different samples (Si chip with square membrane). The electronic and thermal elastic PA effects (electronic deformation and thermoelastic mechanisms of elastic wave generation) in a Si simply supported rectangular plate (3D geometry), photogenerated by a uniform and intensity-modulated optical beam, were studied. The theoretical model for the PA elastic bending frequency distribution by using the Green function method was given. The amplitude and phase PA signals were calculated and analyzed, including the thermalization and surface and volume recombination heat sources. The theoretical results were compared with experimental data. PB - Springer/Plenum Publishers, New York T2 - International Journal of Thermophysics T1 - Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method VL - 33 IS - 10-11 SP - 2222 EP - 2229 DO - 10.1007/s10765-012-1242-9 ER -
@article{ author = "Todorović, D. M. and Rabasovic, M. D. and Markushev, D. D. and Jović, Vesna and Radulović, Katarina", year = "2012", abstract = "Photoacoustic (PA) and photothermal (PT) science and technology extensively developed new methods for the investigation of micro (nano)-mechanical structures. PA and PT effects can be important also as driven mechanisms for optically excited micromechanical structures. The photoacoustic elastic bending method (PA-EBM) is based on the optical excitation of the micromechanical structure and detection of the acoustic response (PA signal) with a very sensitive PA detection system. The experimental PA elastic bending signals of the whole micromechanical structure were measured by using a special constructed PA cell (the gas-microphone detection technique with transmission configuration). The PA amplitude and phase spectra were measured, as a function of the modulation frequency in a frequency range from 20 Hz to 20 000 Hz, for different samples (Si chip with square membrane). The electronic and thermal elastic PA effects (electronic deformation and thermoelastic mechanisms of elastic wave generation) in a Si simply supported rectangular plate (3D geometry), photogenerated by a uniform and intensity-modulated optical beam, were studied. The theoretical model for the PA elastic bending frequency distribution by using the Green function method was given. The amplitude and phase PA signals were calculated and analyzed, including the thermalization and surface and volume recombination heat sources. The theoretical results were compared with experimental data.", publisher = "Springer/Plenum Publishers, New York", journal = "International Journal of Thermophysics", title = "Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method", volume = "33", number = "10-11", pages = "2222-2229", doi = "10.1007/s10765-012-1242-9" }
Todorović, D. M., Rabasovic, M. D., Markushev, D. D., Jović, V.,& Radulović, K.. (2012). Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method. in International Journal of Thermophysics Springer/Plenum Publishers, New York., 33(10-11), 2222-2229. https://doi.org/10.1007/s10765-012-1242-9
Todorović DM, Rabasovic MD, Markushev DD, Jović V, Radulović K. Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method. in International Journal of Thermophysics. 2012;33(10-11):2222-2229. doi:10.1007/s10765-012-1242-9 .
Todorović, D. M., Rabasovic, M. D., Markushev, D. D., Jović, Vesna, Radulović, Katarina, "Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method" in International Journal of Thermophysics, 33, no. 10-11 (2012):2222-2229, https://doi.org/10.1007/s10765-012-1242-9 . .