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Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method

Authorized Users Only
2012
Authors
Todorović, D. M.
Rabasovic, M. D.
Markushev, D. D.
Jović, Vesna
Radulović, Katarina
Article (Published version)
Metadata
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Abstract
Photoacoustic (PA) and photothermal (PT) science and technology extensively developed new methods for the investigation of micro (nano)-mechanical structures. PA and PT effects can be important also as driven mechanisms for optically excited micromechanical structures. The photoacoustic elastic bending method (PA-EBM) is based on the optical excitation of the micromechanical structure and detection of the acoustic response (PA signal) with a very sensitive PA detection system. The experimental PA elastic bending signals of the whole micromechanical structure were measured by using a special constructed PA cell (the gas-microphone detection technique with transmission configuration). The PA amplitude and phase spectra were measured, as a function of the modulation frequency in a frequency range from 20 Hz to 20 000 Hz, for different samples (Si chip with square membrane). The electronic and thermal elastic PA effects (electronic deformation and thermoelastic mechanisms of elastic wave g...eneration) in a Si simply supported rectangular plate (3D geometry), photogenerated by a uniform and intensity-modulated optical beam, were studied. The theoretical model for the PA elastic bending frequency distribution by using the Green function method was given. The amplitude and phase PA signals were calculated and analyzed, including the thermalization and surface and volume recombination heat sources. The theoretical results were compared with experimental data.

Keywords:
Elastic bending / Electronic deformation / Membranes / Micromechanical structures / Photoacoustic / Photothermal / Thermoelastic
Source:
International Journal of Thermophysics, 2012, 33, 10-11, 2222-2229
Publisher:
  • Springer/Plenum Publishers, New York
Projects:
  • Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
  • Atomic collision processes and photoacoustic spectroscopy of molecules and solids (RS-171016)

DOI: 10.1007/s10765-012-1242-9

ISSN: 0195-928X

WoS: 000312072300065

Scopus: 2-s2.0-84888389549
[ Google Scholar ]
7
7
URI
http://cer.ihtm.bg.ac.rs/handle/123456789/1120
Collections
  • Radovi istraživača / Researchers' publications
Institution
IHTM
TY  - JOUR
AU  - Todorović, D. M.
AU  - Rabasovic, M. D.
AU  - Markushev, D. D.
AU  - Jović, Vesna
AU  - Radulović, Katarina
PY  - 2012
UR  - http://cer.ihtm.bg.ac.rs/handle/123456789/1120
AB  - Photoacoustic (PA) and photothermal (PT) science and technology extensively developed new methods for the investigation of micro (nano)-mechanical structures. PA and PT effects can be important also as driven mechanisms for optically excited micromechanical structures. The photoacoustic elastic bending method (PA-EBM) is based on the optical excitation of the micromechanical structure and detection of the acoustic response (PA signal) with a very sensitive PA detection system. The experimental PA elastic bending signals of the whole micromechanical structure were measured by using a special constructed PA cell (the gas-microphone detection technique with transmission configuration). The PA amplitude and phase spectra were measured, as a function of the modulation frequency in a frequency range from 20 Hz to 20 000 Hz, for different samples (Si chip with square membrane). The electronic and thermal elastic PA effects (electronic deformation and thermoelastic mechanisms of elastic wave generation) in a Si simply supported rectangular plate (3D geometry), photogenerated by a uniform and intensity-modulated optical beam, were studied. The theoretical model for the PA elastic bending frequency distribution by using the Green function method was given. The amplitude and phase PA signals were calculated and analyzed, including the thermalization and surface and volume recombination heat sources. The theoretical results were compared with experimental data.
PB  - Springer/Plenum Publishers, New York
T2  - International Journal of Thermophysics
T1  - Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method
VL  - 33
IS  - 10-11
SP  - 2222
EP  - 2229
DO  - 10.1007/s10765-012-1242-9
ER  - 
@article{
author = "Todorović, D. M. and Rabasovic, M. D. and Markushev, D. D. and Jović, Vesna and Radulović, Katarina",
year = "2012",
url = "http://cer.ihtm.bg.ac.rs/handle/123456789/1120",
abstract = "Photoacoustic (PA) and photothermal (PT) science and technology extensively developed new methods for the investigation of micro (nano)-mechanical structures. PA and PT effects can be important also as driven mechanisms for optically excited micromechanical structures. The photoacoustic elastic bending method (PA-EBM) is based on the optical excitation of the micromechanical structure and detection of the acoustic response (PA signal) with a very sensitive PA detection system. The experimental PA elastic bending signals of the whole micromechanical structure were measured by using a special constructed PA cell (the gas-microphone detection technique with transmission configuration). The PA amplitude and phase spectra were measured, as a function of the modulation frequency in a frequency range from 20 Hz to 20 000 Hz, for different samples (Si chip with square membrane). The electronic and thermal elastic PA effects (electronic deformation and thermoelastic mechanisms of elastic wave generation) in a Si simply supported rectangular plate (3D geometry), photogenerated by a uniform and intensity-modulated optical beam, were studied. The theoretical model for the PA elastic bending frequency distribution by using the Green function method was given. The amplitude and phase PA signals were calculated and analyzed, including the thermalization and surface and volume recombination heat sources. The theoretical results were compared with experimental data.",
publisher = "Springer/Plenum Publishers, New York",
journal = "International Journal of Thermophysics",
title = "Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method",
volume = "33",
number = "10-11",
pages = "2222-2229",
doi = "10.1007/s10765-012-1242-9"
}
Todorović DM, Rabasovic MD, Markushev DD, Jović V, Radulović K. Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method. International Journal of Thermophysics. 2012;33(10-11):2222-2229
Todorović, D. M., Rabasovic, M. D., Markushev, D. D., Jović, V.,& Radulović, K. (2012). Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method.
International Journal of ThermophysicsSpringer/Plenum Publishers, New York., 33(10-11), 2222-2229.
https://doi.org/10.1007/s10765-012-1242-9
Todorović D. M., Rabasovic M. D., Markushev D. D., Jović Vesna, Radulović Katarina, "Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method" 33, no. 10-11 (2012):2222-2229,
https://doi.org/10.1007/s10765-012-1242-9 .

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