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Microfabrication by Mask-maskless wet Anisotropic Etching for Realization of Multilevel Structures in {100} Oriented Si
dc.creator | Jović, Vesna | |
dc.creator | Smiljanić, Milče | |
dc.creator | Lamovec, Jelena | |
dc.creator | Popović, M. | |
dc.date.accessioned | 2019-01-30T17:32:27Z | |
dc.date.available | 2019-01-30T17:32:27Z | |
dc.date.issued | 2012 | |
dc.identifier.issn | 2159-1660 | |
dc.identifier.uri | https://cer.ihtm.bg.ac.rs/handle/123456789/1098 | |
dc.description.abstract | Step-like structures oriented along LT 110 > or LT 110 > directions on {100} oriented Si substrates are first etched with mask following maskless etching in 30 wt. % KOH solution in water at 80 degrees C. The step structures investigated by maskless etching are convex prismatic edges bounded by {100} and {111} planes for LT 110 > oriented steps or only {100} planes for LT 110 > oriented steps. Experimental results are used to verify the nature of {hkl} cutting planes that are developed at the convex corners of the steps during maskless anisotropic etching. From analytical relations and experimental results, the ratio between the etching rates for the {hkl} (fast-etching plane at the edge step) and {100} planes is found for both step orientations. | en |
dc.publisher | Institute of Electrical and Electronics Engineers Inc. | |
dc.relation | info:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS// | |
dc.relation | European Commission 7th Framework Programme through the project Regmina, grant 205533 | |
dc.rights | restrictedAccess | |
dc.source | 28th International Conference on Microelectronics - Proceedings, MIEL 2012 | |
dc.title | Microfabrication by Mask-maskless wet Anisotropic Etching for Realization of Multilevel Structures in {100} Oriented Si | en |
dc.type | conferenceObject | |
dc.rights.license | ARR | |
dcterms.abstract | Јовић, Весна; Ламовец, Јелена; Смиљанић, Милче; Поповиц, М.; | |
dc.citation.spage | 139 | |
dc.citation.epage | 142 | |
dc.citation.other | : 139-142 | |
dc.identifier.doi | 10.1109/MIEL.2012.6222817 | |
dc.identifier.scopus | 2-s2.0-84864230506 | |
dc.identifier.wos | 000309119600027 | |
dc.type.version | publishedVersion |