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dc.creatorRanđelović, Danijela
dc.creatorLazić, Žarko
dc.creatorPopović, M.
dc.creatorMatic, M.
dc.date.accessioned2019-01-30T17:32:24Z
dc.date.available2019-01-30T17:32:24Z
dc.date.issued2012
dc.identifier.issn2159-1660
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/1096
dc.description.abstractIn this paper gas sensing performance of IHTM thermopile-based MEMS sensors is studied both theoretically and experimentally. The sensor has already been proven to be a multipurpose device and this work explores possibilities of broadening of its field of application towards gas sensing. Simulation data are given for the study of gas type and binary gas mixture composition detection. Experimental results considering air and helium detection are in good agreement with theoretical predictions.en
dc.publisherInstitute of Electrical and Electronics Engineers Inc.
dc.relationinfo:eu-repo/grantAgreement/EC/FP7/205533/EU//
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//
dc.rightsrestrictedAccess
dc.source28th International Conference on Microelectronics - Proceedings, MIEL 2012
dc.titleHelium Sensing Using Multipurpose Thermopile-Based MEMS devicesen
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractЛазић, Жарко; Матиц, М.; Ранђеловић, Данијела; Поповиц, М.;
dc.citation.spage147
dc.citation.epage150
dc.citation.other: 147-150
dc.identifier.doi10.1109/MIEL.2012.6222819
dc.identifier.rcubConv_2853
dc.identifier.scopus2-s2.0-84864233867
dc.identifier.wos000309119600029
dc.type.versionpublishedVersion


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