Helium Sensing Using Multipurpose Thermopile-Based MEMS devices
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2012
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Metapodaci
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In this paper gas sensing performance of IHTM thermopile-based MEMS sensors is studied both theoretically and experimentally. The sensor has already been proven to be a multipurpose device and this work explores possibilities of broadening of its field of application towards gas sensing. Simulation data are given for the study of gas type and binary gas mixture composition detection. Experimental results considering air and helium detection are in good agreement with theoretical predictions.
Izvor:
28th International Conference on Microelectronics - Proceedings, MIEL 2012, 2012, 147-150Izdavač:
- Institute of Electrical and Electronics Engineers Inc.
Finansiranje / projekti:
- Reinforcement of Regional Microsystems and Nanosystems Centre (EU-205533)
- Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-32008)
DOI: 10.1109/MIEL.2012.6222819
ISSN: 2159-1660
WoS: 000309119600029
Scopus: 2-s2.0-84864233867
Institucija/grupa
IHTMTY - CONF AU - Randjelović, Danijela AU - Lazić, Žarko AU - Popović, M. AU - Matic, M. PY - 2012 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/1096 AB - In this paper gas sensing performance of IHTM thermopile-based MEMS sensors is studied both theoretically and experimentally. The sensor has already been proven to be a multipurpose device and this work explores possibilities of broadening of its field of application towards gas sensing. Simulation data are given for the study of gas type and binary gas mixture composition detection. Experimental results considering air and helium detection are in good agreement with theoretical predictions. PB - Institute of Electrical and Electronics Engineers Inc. C3 - 28th International Conference on Microelectronics - Proceedings, MIEL 2012 T1 - Helium Sensing Using Multipurpose Thermopile-Based MEMS devices SP - 147 EP - 150 DO - 10.1109/MIEL.2012.6222819 ER -
@conference{ author = "Randjelović, Danijela and Lazić, Žarko and Popović, M. and Matic, M.", year = "2012", abstract = "In this paper gas sensing performance of IHTM thermopile-based MEMS sensors is studied both theoretically and experimentally. The sensor has already been proven to be a multipurpose device and this work explores possibilities of broadening of its field of application towards gas sensing. Simulation data are given for the study of gas type and binary gas mixture composition detection. Experimental results considering air and helium detection are in good agreement with theoretical predictions.", publisher = "Institute of Electrical and Electronics Engineers Inc.", journal = "28th International Conference on Microelectronics - Proceedings, MIEL 2012", title = "Helium Sensing Using Multipurpose Thermopile-Based MEMS devices", pages = "147-150", doi = "10.1109/MIEL.2012.6222819" }
Randjelović, D., Lazić, Ž., Popović, M.,& Matic, M.. (2012). Helium Sensing Using Multipurpose Thermopile-Based MEMS devices. in 28th International Conference on Microelectronics - Proceedings, MIEL 2012 Institute of Electrical and Electronics Engineers Inc.., 147-150. https://doi.org/10.1109/MIEL.2012.6222819
Randjelović D, Lazić Ž, Popović M, Matic M. Helium Sensing Using Multipurpose Thermopile-Based MEMS devices. in 28th International Conference on Microelectronics - Proceedings, MIEL 2012. 2012;:147-150. doi:10.1109/MIEL.2012.6222819 .
Randjelović, Danijela, Lazić, Žarko, Popović, M., Matic, M., "Helium Sensing Using Multipurpose Thermopile-Based MEMS devices" in 28th International Conference on Microelectronics - Proceedings, MIEL 2012 (2012):147-150, https://doi.org/10.1109/MIEL.2012.6222819 . .