Wide Band-stop Microwave Microstrip Filter on High-resistivity Silicon

Abstract

Low-resistivity silicon (standard CMOS-grade silicon) is a troublesome issue for the microwave passive components. One solution is using high-resistivity silicon (HRS). Wide band-stop filter on high-resistivity silicon (HRS), 5 k Omega-cm, is introduced. The filter is simulated and successfully fabricated in microstrip technology. Relative stop band width is over 70 % for 20 dB suppression. Reflection, S11, in the pass band is -17 dB or lower. Metallization was sputterd aluminum (Al) and silver epoxy was used for bonding.