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Wide Band-stop Microwave Microstrip Filter on High-resistivity Silicon

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2012
Authors
Nešić, Dušan
Jokić, Ivana
Frantlović, Miloš
Sarajlić, Milija
Article (Published version)
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Abstract
Low-resistivity silicon (standard CMOS-grade silicon) is a troublesome issue for the microwave passive components. One solution is using high-resistivity silicon (HRS). Wide band-stop filter on high-resistivity silicon (HRS), 5 k Omega-cm, is introduced. The filter is simulated and successfully fabricated in microstrip technology. Relative stop band width is over 70 % for 20 dB suppression. Reflection, S11, in the pass band is -17 dB or lower. Metallization was sputterd aluminum (Al) and silver epoxy was used for bonding.
Keywords:
Microwave / High-resistivity silicon (HRS) / Band-stop filter / Sputtered aluminum (Al)
Source:
Informacije Midem-Journal of Microelectronics Electronic Components and Materials, 2012, 42, 4, 282-286
Publisher:
  • Soc Microelectronics, Electron Components Materials-Midem, Ljubljjana
Projects:
  • Reinforcement of Regional Microsystems and Nanosystems Centre (EU-205533)
  • Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)

ISSN: 0352-9045

WoS: 000315953900009

Scopus: 2-s2.0-84876971901
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URI
http://cer.ihtm.bg.ac.rs/handle/123456789/1080
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