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Fabrication of Sio2-based microcantilevers by anisotropic chemical etching of (100) single crystal Si / Izrada mikrogredica od SiO2 anizotropnim hemijskim nagrizanjem na monokristalnom silicijumu (100) orijentacije
(Serbian Chemical Society, 2007)
The undercutting process of thermal SiO2 microcantilevers with different orientations on (100) Si wafer was studied. The silicon substrate was removed by anisotropic chemical etching with a 25 wt. % aqueous solution of ...