Преглед IHTM тема: "bulk silicon micromachining"
Приказ резултата 1-2 од 2
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A comparison of different convex corner compensation strucutures applicable in anisotropic wet chemical etching of {100} oriented silicon
(Belgrade : The Military Technical Institute, 2016) -
Characterization of PDMS membranes fabricated by bulkmicromachining on silicon wafers
(Belgrade : Military Technical Institute, 2014)