Fundamental processes and applications of particle transport in non-equilibrium plasmas, traps and nanostructures

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Fundamental processes and applications of particle transport in non-equilibrium plasmas, traps and nanostructures (en)
Фундаментални процеси и примене транспорта честица у неравнотежним плазмама, траповима и наноструктурама (sr)
Fundamentalni procesi i primene transporta čestica u neravnotežnim plazmama, trapovima i nanostrukturama (sr_RS)
Authors

Publications

Simulation and experimental study of maskless convex corner compensation in TMAH water solution

Smiljanić, Milče; Radjenovic, Branislav; Radmilović-Radjenović, Marija; Lazić, Žarko; Jović, Vesna

(Iop Publishing Ltd, Bristol, 2014) 

TY  - JOUR
AU  - Smiljanić, Milče
AU  - Radjenovic, Branislav
AU  - Radmilović-Radjenović, Marija
AU  - Lazić, Žarko
AU  - Jović, Vesna
PY  - 2014
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/1426
AB  - Maskless etching with convex corner compensation in the form of a  LT  100 > oriented beam is investigated using both experiments and simulations. The maskless convex corner compensation technique is defined as a combination of masked and maskless anisotropic etching of {1 0 0} silicon in 25 wt% TMAH water solution at a temperature of 80 degrees C. This technique enables fabrication of three-level micromachined silicon structures with compensated convex corners at the bottom of the etched structure. All crystallographic planes that appear during etching are determined and their etch rates are used to calculate the etch rate value in an arbitrary crystallographic direction necessary for simulation by an interpolation procedure. A 3D simulation of the profile evolution of the etched structure during masked and maskless etching of silicon based on the level set method is presented. All crystallographic planes of the etched silicon structures determined in the experiment are recognized in the corresponding simulated etching profiles obtained by the level set method.
PB  - Iop Publishing Ltd, Bristol
T2  - Journal of Micromechanics and Microengineering
T1  - Simulation and experimental study of maskless convex corner compensation in TMAH water solution
VL  - 24
IS  - 11
DO  - 10.1088/0960-1317/24/11/115003
ER  - 
@article{
author = "Smiljanić, Milče and Radjenovic, Branislav and Radmilović-Radjenović, Marija and Lazić, Žarko and Jović, Vesna",
year = "2014",
abstract = "Maskless etching with convex corner compensation in the form of a  LT  100 > oriented beam is investigated using both experiments and simulations. The maskless convex corner compensation technique is defined as a combination of masked and maskless anisotropic etching of {1 0 0} silicon in 25 wt% TMAH water solution at a temperature of 80 degrees C. This technique enables fabrication of three-level micromachined silicon structures with compensated convex corners at the bottom of the etched structure. All crystallographic planes that appear during etching are determined and their etch rates are used to calculate the etch rate value in an arbitrary crystallographic direction necessary for simulation by an interpolation procedure. A 3D simulation of the profile evolution of the etched structure during masked and maskless etching of silicon based on the level set method is presented. All crystallographic planes of the etched silicon structures determined in the experiment are recognized in the corresponding simulated etching profiles obtained by the level set method.",
publisher = "Iop Publishing Ltd, Bristol",
journal = "Journal of Micromechanics and Microengineering",
title = "Simulation and experimental study of maskless convex corner compensation in TMAH water solution",
volume = "24",
number = "11",
doi = "10.1088/0960-1317/24/11/115003"
}
Smiljanić, M., Radjenovic, B., Radmilović-Radjenović, M., Lazić, Ž.,& Jović, V.. (2014). Simulation and experimental study of maskless convex corner compensation in TMAH water solution. in Journal of Micromechanics and Microengineering
Iop Publishing Ltd, Bristol., 24(11).
https://doi.org/10.1088/0960-1317/24/11/115003
Smiljanić M, Radjenovic B, Radmilović-Radjenović M, Lazić Ž, Jović V. Simulation and experimental study of maskless convex corner compensation in TMAH water solution. in Journal of Micromechanics and Microengineering. 2014;24(11).
doi:10.1088/0960-1317/24/11/115003 .
Smiljanić, Milče, Radjenovic, Branislav, Radmilović-Radjenović, Marija, Lazić, Žarko, Jović, Vesna, "Simulation and experimental study of maskless convex corner compensation in TMAH water solution" in Journal of Micromechanics and Microengineering, 24, no. 11 (2014),
https://doi.org/10.1088/0960-1317/24/11/115003 . .
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