TY  - JOUR
AU  - Todorović, D. M.
AU  - Rabasovic, M. D.
AU  - Markushev, D. D.
AU  - Jović, Vesna
AU  - Radulović, Katarina
PY  - 2017
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/2193
AB  - Rectangular silicon cantilevers are studied by the photoacoustic (PA) elastic bending method. Experimental signals versus modulation frequency of the excitation optical beam are measured and analyzed in a frequency range from 20 Hz to 50 000 Hz. The procedure for experimental signal correction to eliminate the frequency characteristics of the measuring system is given. The corrected experimental signal shows a good correlation with theoretically calculated PA signal at frequencies below 32 000 Hz. The corrected experimental PA elastic bending signals for cantilevers with different thicknesses are analyzed. The experimental results allow identifying the resonant frequency (the first resonant mode) of the cantilever vibrations. These values are in good agreement with the theoretically computed values. A theoretical model of the optically excited Si cantilever is derived, taking into account plasmaelastic, thermoelastic, and thermodiffusion mechanisms. Dynamic relations for the amplitude and phase of electronic and thermal elastic vibrations in optically excited cantilevers are derived. The theoretical model is compared to the experimental results.
PB  - Springer/Plenum Publishers, New York
T2  - International Journal of Thermophysics
T1  - Study of Silicon Cantilevers by the Photoacoustic Elastic Bending Method
VL  - 38
IS  - 3
DO  - 10.1007/s10765-016-2175-5
ER  - 

@article{
author = "Todorović, D. M. and Rabasovic, M. D. and Markushev, D. D. and Jović, Vesna and Radulović, Katarina",
year = "2017",
abstract = "Rectangular silicon cantilevers are studied by the photoacoustic (PA) elastic bending method. Experimental signals versus modulation frequency of the excitation optical beam are measured and analyzed in a frequency range from 20 Hz to 50 000 Hz. The procedure for experimental signal correction to eliminate the frequency characteristics of the measuring system is given. The corrected experimental signal shows a good correlation with theoretically calculated PA signal at frequencies below 32 000 Hz. The corrected experimental PA elastic bending signals for cantilevers with different thicknesses are analyzed. The experimental results allow identifying the resonant frequency (the first resonant mode) of the cantilever vibrations. These values are in good agreement with the theoretically computed values. A theoretical model of the optically excited Si cantilever is derived, taking into account plasmaelastic, thermoelastic, and thermodiffusion mechanisms. Dynamic relations for the amplitude and phase of electronic and thermal elastic vibrations in optically excited cantilevers are derived. The theoretical model is compared to the experimental results.",
publisher = "Springer/Plenum Publishers, New York",
journal = "International Journal of Thermophysics",
title = "Study of Silicon Cantilevers by the Photoacoustic Elastic Bending Method",
volume = "38",
number = "3",
doi = "10.1007/s10765-016-2175-5"
}

Todorović, D. M., Rabasovic, M. D., Markushev, D. D., Jović, V.,& Radulović, K.. (2017). Study of Silicon Cantilevers by the Photoacoustic Elastic Bending Method. in International Journal of Thermophysics
Springer/Plenum Publishers, New York., 38(3).
https://doi.org/10.1007/s10765-016-2175-5

Todorović DM, Rabasovic MD, Markushev DD, Jović V, Radulović K. Study of Silicon Cantilevers by the Photoacoustic Elastic Bending Method. in International Journal of Thermophysics. 2017;38(3).
doi:10.1007/s10765-016-2175-5 .

Todorović, D. M., Rabasovic, M. D., Markushev, D. D., Jović, Vesna, Radulović, Katarina, "Study of Silicon Cantilevers by the Photoacoustic Elastic Bending Method" in International Journal of Thermophysics, 38, no. 3 (2017),
https://doi.org/10.1007/s10765-016-2175-5 . .

TY  - JOUR
AU  - Todorović, D. M.
AU  - Rabasovic, M D
AU  - Markushev, D D
AU  - Jović, Vesna
AU  - Radulović, Katarina
AU  - Sarajlić, Milija
PY  - 2015
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/1652
AB  - Photoacoustic (PA) elastic bending effects have been studied and used to develop the experimental non-contact and non-destructive method that make it possible to investigate the optical, thermal, and elastic properties of thin films. A theoretical model for optically excited thin films on a Si membrane, which includes plasmaelastic, thermoelastic, and thermodiffusion mechanisms, is given. Relations for the PA elastic bending signal in the optically excited two-layer Si membrane are derived. The method was verified by measuring the experimental amplitude and phase of the PA elastic bending of the thin film on Si square membranes and compared with the theoretically calculated spectra. The analysis shows that it is possible to obtain the optical, thermal, and elastic parameters of a film thinner than 1 mu m.
PB  - Springer/Plenum Publishers, New York
T2  - International Journal of Thermophysics
T1  - Photoacoustic Elastic Bending Method: Characterization of Thin Films on Silicon Membranes
VL  - 36
IS  - 5-6
SP  - 1016
EP  - 1028
DO  - 10.1007/s10765-014-1801-3
ER  - 

@article{
author = "Todorović, D. M. and Rabasovic, M D and Markushev, D D and Jović, Vesna and Radulović, Katarina and Sarajlić, Milija",
year = "2015",
abstract = "Photoacoustic (PA) elastic bending effects have been studied and used to develop the experimental non-contact and non-destructive method that make it possible to investigate the optical, thermal, and elastic properties of thin films. A theoretical model for optically excited thin films on a Si membrane, which includes plasmaelastic, thermoelastic, and thermodiffusion mechanisms, is given. Relations for the PA elastic bending signal in the optically excited two-layer Si membrane are derived. The method was verified by measuring the experimental amplitude and phase of the PA elastic bending of the thin film on Si square membranes and compared with the theoretically calculated spectra. The analysis shows that it is possible to obtain the optical, thermal, and elastic parameters of a film thinner than 1 mu m.",
publisher = "Springer/Plenum Publishers, New York",
journal = "International Journal of Thermophysics",
title = "Photoacoustic Elastic Bending Method: Characterization of Thin Films on Silicon Membranes",
volume = "36",
number = "5-6",
pages = "1016-1028",
doi = "10.1007/s10765-014-1801-3"
}

Todorović, D. M., Rabasovic, M. D., Markushev, D. D., Jović, V., Radulović, K.,& Sarajlić, M.. (2015). Photoacoustic Elastic Bending Method: Characterization of Thin Films on Silicon Membranes. in International Journal of Thermophysics
Springer/Plenum Publishers, New York., 36(5-6), 1016-1028.
https://doi.org/10.1007/s10765-014-1801-3

Todorović DM, Rabasovic MD, Markushev DD, Jović V, Radulović K, Sarajlić M. Photoacoustic Elastic Bending Method: Characterization of Thin Films on Silicon Membranes. in International Journal of Thermophysics. 2015;36(5-6):1016-1028.
doi:10.1007/s10765-014-1801-3 .

Todorović, D. M., Rabasovic, M D, Markushev, D D, Jović, Vesna, Radulović, Katarina, Sarajlić, Milija, "Photoacoustic Elastic Bending Method: Characterization of Thin Films on Silicon Membranes" in International Journal of Thermophysics, 36, no. 5-6 (2015):1016-1028,
https://doi.org/10.1007/s10765-014-1801-3 . .

TY  - JOUR
AU  - Todorović, D. M.
AU  - Rabasovic, M D
AU  - Markushev, D D
AU  - Sarajlić, Milija
PY  - 2014
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/1422
AB  - The aim of this work is the development of photoacoustic (PA) method for the measurement and determination of parametres of thin films (with a thickness of less than 1 mu m). Experimental study of the optical, thermal, and elastic characteristics of the thin film on Si substrate by PA elastic bending method was given. Thin film-semiconductor (Si) sample is modeled by simultaneous analysis of the plasma, thermal, and elastic wave equations. Two normalization procedures of the PA elastic bending signal in function of the modulation frequency of the optical excitation were established. The experimental PA elastic bending signals were measured and analysed. Without loss of generality, the TiO2 thin film (with a thickness of 0.5 mu m) on Si substrate (circular plate) was experimentaly studied. We have studied the PA elastic bending signals in order to obtain the values of optical, thermal, and elastic parameters of TiO2 film. The analysis shows that it is possible to develop noncontact and nondestructive experimental method-PA elastic bending method for thin film study, with possibility to obtain the optical, thermal, and elastic parameters of the film thinner than 1 mu m.
PB  - Amer Inst Physics, Melville
T2  - Journal of Applied Physics
T1  - Photoacoustic elastic bending in thin film-substrate system: Experimental determination of the thin film parameters
VL  - 116
IS  - 5
DO  - 10.1063/1.4890346
ER  - 

@article{
author = "Todorović, D. M. and Rabasovic, M D and Markushev, D D and Sarajlić, Milija",
year = "2014",
abstract = "The aim of this work is the development of photoacoustic (PA) method for the measurement and determination of parametres of thin films (with a thickness of less than 1 mu m). Experimental study of the optical, thermal, and elastic characteristics of the thin film on Si substrate by PA elastic bending method was given. Thin film-semiconductor (Si) sample is modeled by simultaneous analysis of the plasma, thermal, and elastic wave equations. Two normalization procedures of the PA elastic bending signal in function of the modulation frequency of the optical excitation were established. The experimental PA elastic bending signals were measured and analysed. Without loss of generality, the TiO2 thin film (with a thickness of 0.5 mu m) on Si substrate (circular plate) was experimentaly studied. We have studied the PA elastic bending signals in order to obtain the values of optical, thermal, and elastic parameters of TiO2 film. The analysis shows that it is possible to develop noncontact and nondestructive experimental method-PA elastic bending method for thin film study, with possibility to obtain the optical, thermal, and elastic parameters of the film thinner than 1 mu m.",
publisher = "Amer Inst Physics, Melville",
journal = "Journal of Applied Physics",
title = "Photoacoustic elastic bending in thin film-substrate system: Experimental determination of the thin film parameters",
volume = "116",
number = "5",
doi = "10.1063/1.4890346"
}

Todorović, D. M., Rabasovic, M. D., Markushev, D. D.,& Sarajlić, M.. (2014). Photoacoustic elastic bending in thin film-substrate system: Experimental determination of the thin film parameters. in Journal of Applied Physics
Amer Inst Physics, Melville., 116(5).
https://doi.org/10.1063/1.4890346

Todorović DM, Rabasovic MD, Markushev DD, Sarajlić M. Photoacoustic elastic bending in thin film-substrate system: Experimental determination of the thin film parameters. in Journal of Applied Physics. 2014;116(5).
doi:10.1063/1.4890346 .

Todorović, D. M., Rabasovic, M D, Markushev, D D, Sarajlić, Milija, "Photoacoustic elastic bending in thin film-substrate system: Experimental determination of the thin film parameters" in Journal of Applied Physics, 116, no. 5 (2014),
https://doi.org/10.1063/1.4890346 . .

TY  - CONF
AU  - Todorović, D. M.
AU  - Markushev, D.D.
AU  - Rabasović, M.D.
AU  - Radulović, Katarina
AU  - Jović, Vesna
PY  - 2012
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/1141
AB  - Photoacoustic (PA) amplitude and phase spectra vs the modulation frequency of the excitation optical beam were measured and analyzed by PA elastic bending method. The PA spectra were measured in a frequency range (from 20 to 20000 Hz), for different thicknesses of Si rectangular membranes (from 10 to 100 m) The elastic characteristics of the Si chip with square membranes were described by the theory of thin elastic plate, i.e. as an elastic simply supported rectangular plate. The PA signals (sum of the thermodiffusion, thermoelastic and electronic deformation components) were calculated and compared with the experimental ones. These results showed that the PA elastic bending spectra are convenient for investigation the characteristics of micromechanical membraines. The PA elastic bending spectra of the optically driven micro-opto-electro- mechanical systems (MOEMS) enable, for example, to investigate the different electronic and thermal transport characteristics or technological processes in MEMS fabrications, etc.
C3  - 28th International Conference on Microelectronics - Proceedings, MIEL 2012
T1  - Photoacoustic elastic bending method: Study of the silicon membranes
SP  - 169
EP  - 172
DO  - 10.1109/MIEL.2012.6222825
ER  - 

@conference{
author = "Todorović, D. M. and Markushev, D.D. and Rabasović, M.D. and Radulović, Katarina and Jović, Vesna",
year = "2012",
abstract = "Photoacoustic (PA) amplitude and phase spectra vs the modulation frequency of the excitation optical beam were measured and analyzed by PA elastic bending method. The PA spectra were measured in a frequency range (from 20 to 20000 Hz), for different thicknesses of Si rectangular membranes (from 10 to 100 m) The elastic characteristics of the Si chip with square membranes were described by the theory of thin elastic plate, i.e. as an elastic simply supported rectangular plate. The PA signals (sum of the thermodiffusion, thermoelastic and electronic deformation components) were calculated and compared with the experimental ones. These results showed that the PA elastic bending spectra are convenient for investigation the characteristics of micromechanical membraines. The PA elastic bending spectra of the optically driven micro-opto-electro- mechanical systems (MOEMS) enable, for example, to investigate the different electronic and thermal transport characteristics or technological processes in MEMS fabrications, etc.",
journal = "28th International Conference on Microelectronics - Proceedings, MIEL 2012",
title = "Photoacoustic elastic bending method: Study of the silicon membranes",
pages = "169-172",
doi = "10.1109/MIEL.2012.6222825"
}

Todorović, D. M., Markushev, D.D., Rabasović, M.D., Radulović, K.,& Jović, V.. (2012). Photoacoustic elastic bending method: Study of the silicon membranes. in 28th International Conference on Microelectronics - Proceedings, MIEL 2012, 169-172.
https://doi.org/10.1109/MIEL.2012.6222825

Todorović DM, Markushev D, Rabasović M, Radulović K, Jović V. Photoacoustic elastic bending method: Study of the silicon membranes. in 28th International Conference on Microelectronics - Proceedings, MIEL 2012. 2012;:169-172.
doi:10.1109/MIEL.2012.6222825 .

Todorović, D. M., Markushev, D.D., Rabasović, M.D., Radulović, Katarina, Jović, Vesna, "Photoacoustic elastic bending method: Study of the silicon membranes" in 28th International Conference on Microelectronics - Proceedings, MIEL 2012 (2012):169-172,
https://doi.org/10.1109/MIEL.2012.6222825 . .

TY  - JOUR
AU  - Todorović, D. M.
AU  - Rabasovic, M. D.
AU  - Markushev, D. D.
AU  - Jović, Vesna
AU  - Radulović, Katarina
PY  - 2012
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/1120
AB  - Photoacoustic (PA) and photothermal (PT) science and technology extensively developed new methods for the investigation of micro (nano)-mechanical structures. PA and PT effects can be important also as driven mechanisms for optically excited micromechanical structures. The photoacoustic elastic bending method (PA-EBM) is based on the optical excitation of the micromechanical structure and detection of the acoustic response (PA signal) with a very sensitive PA detection system. The experimental PA elastic bending signals of the whole micromechanical structure were measured by using a special constructed PA cell (the gas-microphone detection technique with transmission configuration). The PA amplitude and phase spectra were measured, as a function of the modulation frequency in a frequency range from 20 Hz to 20 000 Hz, for different samples (Si chip with square membrane). The electronic and thermal elastic PA effects (electronic deformation and thermoelastic mechanisms of elastic wave generation) in a Si simply supported rectangular plate (3D geometry), photogenerated by a uniform and intensity-modulated optical beam, were studied. The theoretical model for the PA elastic bending frequency distribution by using the Green function method was given. The amplitude and phase PA signals were calculated and analyzed, including the thermalization and surface and volume recombination heat sources. The theoretical results were compared with experimental data.
PB  - Springer/Plenum Publishers, New York
T2  - International Journal of Thermophysics
T1  - Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method
VL  - 33
IS  - 10-11
SP  - 2222
EP  - 2229
DO  - 10.1007/s10765-012-1242-9
ER  - 

@article{
author = "Todorović, D. M. and Rabasovic, M. D. and Markushev, D. D. and Jović, Vesna and Radulović, Katarina",
year = "2012",
abstract = "Photoacoustic (PA) and photothermal (PT) science and technology extensively developed new methods for the investigation of micro (nano)-mechanical structures. PA and PT effects can be important also as driven mechanisms for optically excited micromechanical structures. The photoacoustic elastic bending method (PA-EBM) is based on the optical excitation of the micromechanical structure and detection of the acoustic response (PA signal) with a very sensitive PA detection system. The experimental PA elastic bending signals of the whole micromechanical structure were measured by using a special constructed PA cell (the gas-microphone detection technique with transmission configuration). The PA amplitude and phase spectra were measured, as a function of the modulation frequency in a frequency range from 20 Hz to 20 000 Hz, for different samples (Si chip with square membrane). The electronic and thermal elastic PA effects (electronic deformation and thermoelastic mechanisms of elastic wave generation) in a Si simply supported rectangular plate (3D geometry), photogenerated by a uniform and intensity-modulated optical beam, were studied. The theoretical model for the PA elastic bending frequency distribution by using the Green function method was given. The amplitude and phase PA signals were calculated and analyzed, including the thermalization and surface and volume recombination heat sources. The theoretical results were compared with experimental data.",
publisher = "Springer/Plenum Publishers, New York",
journal = "International Journal of Thermophysics",
title = "Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method",
volume = "33",
number = "10-11",
pages = "2222-2229",
doi = "10.1007/s10765-012-1242-9"
}

Todorović, D. M., Rabasovic, M. D., Markushev, D. D., Jović, V.,& Radulović, K.. (2012). Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method. in International Journal of Thermophysics
Springer/Plenum Publishers, New York., 33(10-11), 2222-2229.
https://doi.org/10.1007/s10765-012-1242-9

Todorović DM, Rabasovic MD, Markushev DD, Jović V, Radulović K. Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method. in International Journal of Thermophysics. 2012;33(10-11):2222-2229.
doi:10.1007/s10765-012-1242-9 .

Todorović, D. M., Rabasovic, M. D., Markushev, D. D., Jović, Vesna, Radulović, Katarina, "Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method" in International Journal of Thermophysics, 33, no. 10-11 (2012):2222-2229,
https://doi.org/10.1007/s10765-012-1242-9 . .