TY  - CONF
AU  - Lazić, Žarko
AU  - Smiljanić, Milče M.
AU  - Radulović, Katarina
AU  - Rašljić, Milena
AU  - Cvetanović, Katarina
AU  - Vasiljević-Radović, Dana
AU  - Đinović, Zoran
AU  - Kment, Christoph
PY  - 2015
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/5733
AB  - In this work we present the design and manufacturing of the silicon moving plate with cantilever beams. The structure is of a monolithic type which comprises the anchor part, the two cantilever beams and the moving plate. The whole structure was manufactured by using sophisticated
compensation masks to prevent silicon underetching and by using double side photolithography. The set of the three photolithographic masks were used and the etching was performed on both sides of the silicon wafer simultaneously in 25 wt% TMAH water solution. This structure was originally developed for the paraffin based actuator, but it could be used on various platforms including the switching or moving mirror applications, for the steering purposes etc.
PB  - Beograd : Društvo za ETRAN / Belgrade : ETRAN Society
C3  - Proceedings 2n- d International Conference on Electrical, Electronic and Computing Engineering IcETRAN 2015
T1  - Design and Fabrication of the Silicon Moving Plate with Cantilever Beams for Paraffin Based Actuator
SP  - MOI2.1.1
EP  - MOI2.1.6
UR  - https://hdl.handle.net/21.15107/rcub_cer_5733
ER  - 

@conference{
author = "Lazić, Žarko and Smiljanić, Milče M. and Radulović, Katarina and Rašljić, Milena and Cvetanović, Katarina and Vasiljević-Radović, Dana and Đinović, Zoran and Kment, Christoph",
year = "2015",
abstract = "In this work we present the design and manufacturing of the silicon moving plate with cantilever beams. The structure is of a monolithic type which comprises the anchor part, the two cantilever beams and the moving plate. The whole structure was manufactured by using sophisticated
compensation masks to prevent silicon underetching and by using double side photolithography. The set of the three photolithographic masks were used and the etching was performed on both sides of the silicon wafer simultaneously in 25 wt% TMAH water solution. This structure was originally developed for the paraffin based actuator, but it could be used on various platforms including the switching or moving mirror applications, for the steering purposes etc.",
publisher = "Beograd : Društvo za ETRAN / Belgrade : ETRAN Society",
journal = "Proceedings 2n- d International Conference on Electrical, Electronic and Computing Engineering IcETRAN 2015",
title = "Design and Fabrication of the Silicon Moving Plate with Cantilever Beams for Paraffin Based Actuator",
pages = "MOI2.1.1-MOI2.1.6",
url = "https://hdl.handle.net/21.15107/rcub_cer_5733"
}

Lazić, Ž., Smiljanić, M. M., Radulović, K., Rašljić, M., Cvetanović, K., Vasiljević-Radović, D., Đinović, Z.,& Kment, C.. (2015). Design and Fabrication of the Silicon Moving Plate with Cantilever Beams for Paraffin Based Actuator. in Proceedings 2n- d International Conference on Electrical, Electronic and Computing Engineering IcETRAN 2015
Beograd : Društvo za ETRAN / Belgrade : ETRAN Society., MOI2.1.1-MOI2.1.6.
https://hdl.handle.net/21.15107/rcub_cer_5733

Lazić Ž, Smiljanić MM, Radulović K, Rašljić M, Cvetanović K, Vasiljević-Radović D, Đinović Z, Kment C. Design and Fabrication of the Silicon Moving Plate with Cantilever Beams for Paraffin Based Actuator. in Proceedings 2n- d International Conference on Electrical, Electronic and Computing Engineering IcETRAN 2015. 2015;:MOI2.1.1-MOI2.1.6.
https://hdl.handle.net/21.15107/rcub_cer_5733 .

Lazić, Žarko, Smiljanić, Milče M., Radulović, Katarina, Rašljić, Milena, Cvetanović, Katarina, Vasiljević-Radović, Dana, Đinović, Zoran, Kment, Christoph, "Design and Fabrication of the Silicon Moving Plate with Cantilever Beams for Paraffin Based Actuator" in Proceedings 2n- d International Conference on Electrical, Electronic and Computing Engineering IcETRAN 2015 (2015):MOI2.1.1-MOI2.1.6,
https://hdl.handle.net/21.15107/rcub_cer_5733 .