TY  - CONF
AU  - Randjelović, Danijela
AU  - Jovanov, Vladislav
AU  - Lazić, Žarko
AU  - Đurić, Zoran G.
AU  - Matic, A.
PY  - 2008
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/381
AB  - This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer p(+)Si/Al thermocouples and p(+)Si or Al heater. Thermal isolating membrane has sandwich structure consisting of sputtered SiO2 and residual n-Si layer. Dependence of output thermopile voltage on pressure was measured for sensors with different membrane thickness. Tests were performed in pressure range (10(-3)-10(5)) Pa. Experimental results were compared with theoretical predictions.
PB  - Institute of Electrical and Electronics Engineers Inc.
C3  - 26th International Conference on Microelectronics, Vols 1 and 2, Proceedings
T1  - Vacuum MEMS sensor based on thermopiles - Simple model and experimental results
SP  - 367
EP  - 370
DO  - 10.1109/ICMEL.2008.4559298
ER  - 

@conference{
author = "Randjelović, Danijela and Jovanov, Vladislav and Lazić, Žarko and Đurić, Zoran G. and Matic, A.",
year = "2008",
abstract = "This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer p(+)Si/Al thermocouples and p(+)Si or Al heater. Thermal isolating membrane has sandwich structure consisting of sputtered SiO2 and residual n-Si layer. Dependence of output thermopile voltage on pressure was measured for sensors with different membrane thickness. Tests were performed in pressure range (10(-3)-10(5)) Pa. Experimental results were compared with theoretical predictions.",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
journal = "26th International Conference on Microelectronics, Vols 1 and 2, Proceedings",
title = "Vacuum MEMS sensor based on thermopiles - Simple model and experimental results",
pages = "367-370",
doi = "10.1109/ICMEL.2008.4559298"
}

Randjelović, D., Jovanov, V., Lazić, Ž., Đurić, Z. G.,& Matic, A.. (2008). Vacuum MEMS sensor based on thermopiles - Simple model and experimental results. in 26th International Conference on Microelectronics, Vols 1 and 2, Proceedings
Institute of Electrical and Electronics Engineers Inc.., 367-370.
https://doi.org/10.1109/ICMEL.2008.4559298

Randjelović D, Jovanov V, Lazić Ž, Đurić ZG, Matic A. Vacuum MEMS sensor based on thermopiles - Simple model and experimental results. in 26th International Conference on Microelectronics, Vols 1 and 2, Proceedings. 2008;:367-370.
doi:10.1109/ICMEL.2008.4559298 .

Randjelović, Danijela, Jovanov, Vladislav, Lazić, Žarko, Đurić, Zoran G., Matic, A., "Vacuum MEMS sensor based on thermopiles - Simple model and experimental results" in 26th International Conference on Microelectronics, Vols 1 and 2, Proceedings (2008):367-370,
https://doi.org/10.1109/ICMEL.2008.4559298 . .