TY  - CONF
AU  - Todorović, D. M.
AU  - Cretin, B.
AU  - Song, Y.Q.
AU  - Jović, Vesna
PY  - 2010
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/751
AB  - The silicon-dioxide film on the silicon substrate (SiO2/Si) samples were investigated by the photothermal elastic vibration method. The photothermal elastic vibrations in two-layer rectangular plates were optically excited by the focused laser beam and the generated vibrations were measured with a sensitive optical probe (the double-heterodyne interferometer). The photothermal elastic vibrations spectra were measured and analyzed for different types of Si substrate (with and without the SiO2 films) vs the frequency of modulation of the excitation laser. This investigation is important for analysis of the influence of the different technological processes to the vibrations of the optically driven micromechanical structures, i.e. how the technological processes change the characteristics of micromechanical structures.
C3  - 27th International Conference on Microelectronics, MIEL 2010 - Proceedings
T1  - Photothermal elastic vibration spectra of SiO2 film on Si
SP  - 247
EP  - 250
DO  - 10.1109/MIEL.2010.5490490
ER  - 

@conference{
author = "Todorović, D. M. and Cretin, B. and Song, Y.Q. and Jović, Vesna",
year = "2010",
abstract = "The silicon-dioxide film on the silicon substrate (SiO2/Si) samples were investigated by the photothermal elastic vibration method. The photothermal elastic vibrations in two-layer rectangular plates were optically excited by the focused laser beam and the generated vibrations were measured with a sensitive optical probe (the double-heterodyne interferometer). The photothermal elastic vibrations spectra were measured and analyzed for different types of Si substrate (with and without the SiO2 films) vs the frequency of modulation of the excitation laser. This investigation is important for analysis of the influence of the different technological processes to the vibrations of the optically driven micromechanical structures, i.e. how the technological processes change the characteristics of micromechanical structures.",
journal = "27th International Conference on Microelectronics, MIEL 2010 - Proceedings",
title = "Photothermal elastic vibration spectra of SiO2 film on Si",
pages = "247-250",
doi = "10.1109/MIEL.2010.5490490"
}

Todorović, D. M., Cretin, B., Song, Y.Q.,& Jović, V.. (2010). Photothermal elastic vibration spectra of SiO2 film on Si. in 27th International Conference on Microelectronics, MIEL 2010 - Proceedings, 247-250.
https://doi.org/10.1109/MIEL.2010.5490490

Todorović DM, Cretin B, Song Y, Jović V. Photothermal elastic vibration spectra of SiO2 film on Si. in 27th International Conference on Microelectronics, MIEL 2010 - Proceedings. 2010;:247-250.
doi:10.1109/MIEL.2010.5490490 .

Todorović, D. M., Cretin, B., Song, Y.Q., Jović, Vesna, "Photothermal elastic vibration spectra of SiO2 film on Si" in 27th International Conference on Microelectronics, MIEL 2010 - Proceedings (2010):247-250,
https://doi.org/10.1109/MIEL.2010.5490490 . .

TY  - CONF
AU  - Todorović, D. M.
AU  - Cretin, B.
AU  - Song, Y.Q.
AU  - Smiljanić, Milče
AU  - Lazić, Žarko
AU  - Radulović, Katarina
PY  - 2008
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/468
AB  - The low-pressure sensors (IHTM-CMTM, SP-6) with square diaphragms and concentric bosses were investigated by the photothermal elastic vibration method. The photothermal vibrations were optically excited (the focused laser beam) in different diaphragms and the generated elastic vibrations were measured with a sensitive optical probe (the double-heterodyne interferometer). The photothermal vibration frequency spectra were measured and analyzed for different types of diaphragms with a different concentric boss and each type of diaphragms on the different technological level of production. This investigation is important for analysis of the influence of the different technological processes to the vibrations of the optically driven micromechanical structures, i.e. how the technological processes change the characteristics of sensors.
C3  - 26th International Conference on Microelectronics, Proceedings, MIEL 2008
T1  - Photothermal vibration spectra of square diaphragm with boss for low-pressure sensor
SP  - 325
EP  - 328
DO  - 10.1109/ICMEL.2008.4559287
ER  - 

@conference{
author = "Todorović, D. M. and Cretin, B. and Song, Y.Q. and Smiljanić, Milče and Lazić, Žarko and Radulović, Katarina",
year = "2008",
abstract = "The low-pressure sensors (IHTM-CMTM, SP-6) with square diaphragms and concentric bosses were investigated by the photothermal elastic vibration method. The photothermal vibrations were optically excited (the focused laser beam) in different diaphragms and the generated elastic vibrations were measured with a sensitive optical probe (the double-heterodyne interferometer). The photothermal vibration frequency spectra were measured and analyzed for different types of diaphragms with a different concentric boss and each type of diaphragms on the different technological level of production. This investigation is important for analysis of the influence of the different technological processes to the vibrations of the optically driven micromechanical structures, i.e. how the technological processes change the characteristics of sensors.",
journal = "26th International Conference on Microelectronics, Proceedings, MIEL 2008",
title = "Photothermal vibration spectra of square diaphragm with boss for low-pressure sensor",
pages = "325-328",
doi = "10.1109/ICMEL.2008.4559287"
}

Todorović, D. M., Cretin, B., Song, Y.Q., Smiljanić, M., Lazić, Ž.,& Radulović, K.. (2008). Photothermal vibration spectra of square diaphragm with boss for low-pressure sensor. in 26th International Conference on Microelectronics, Proceedings, MIEL 2008, 325-328.
https://doi.org/10.1109/ICMEL.2008.4559287

Todorović DM, Cretin B, Song Y, Smiljanić M, Lazić Ž, Radulović K. Photothermal vibration spectra of square diaphragm with boss for low-pressure sensor. in 26th International Conference on Microelectronics, Proceedings, MIEL 2008. 2008;:325-328.
doi:10.1109/ICMEL.2008.4559287 .

Todorović, D. M., Cretin, B., Song, Y.Q., Smiljanić, Milče, Lazić, Žarko, Radulović, Katarina, "Photothermal vibration spectra of square diaphragm with boss for low-pressure sensor" in 26th International Conference on Microelectronics, Proceedings, MIEL 2008 (2008):325-328,
https://doi.org/10.1109/ICMEL.2008.4559287 . .