TY  - CONF
AU  - Đurić, Zoran
AU  - Dankovic, Tatjana
AU  - Jakšić, Zoran
AU  - Randjelović, Danijela
AU  - Petrovic, Radomir
AU  - Wolfgang, Ehrfeld
AU  - Schmidt, Andreas
AU  - Hecker, Klaus
PY  - 1999
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/6840
AB  - Abstract
In this paper we propose a silicon UV flame detector for combustion systems. In gas burners the relative intensity of flame radiation is dominant in the ultraviolet region (below 0.35 μm). In the visible and infrared regions the relative intensity of radiation of the incandescent surfaces (black body) is several orders of magnitude greater than the gas flame radiation intensity. Therefore it is required that the flame detector has a much greater sensitivity in the ultraviolet region. The proposed detector is formed on n-type silicon on isolator wafer. In order to suppress sensitivity in the visible and the IR regions, the absorption region of the detector is greatly reduced, and a UV filter utilizing photonic crystal is designed. The p-n junctions are formed by very shallow diffusion of impurities. The contacts are made after the deposition of a thin oxide layer. The UV filter is then sputtered on the detector surface. The filter consists of a thin silver film (protected by MgF2), and a one-dimensional photonic crystal made of twelve pairs of NaF/Y2O3 layers. The photonic band gaps of the crystal should suppress the propagation of the light with wavelengths greater than 0.35 μm. For the detector active area of 5 mm2, the thickness of the silver layer of 0.13 μm and a dark current of 1 nA, the noise equivalent power at 0.32 μm is 4.23·10-13W/Hz1/2. The calculated flame signal to total signal ratio is 0.52.
PB  - Society of Photo-Optical Instrumentation Engineers
C3  - Proceedings of SPIE - The International Society for Optical Engineering, Proceedings of the 1999 Design, Test, and Microfabrication of MEMS and MOEMS
T1  - Silicon UV flame detector utilizing photonic crystal
VL  - 3680
IS  - II
SP  - 601
EP  - 610
DO  - 10.1117/12.341251
ER  - 

@conference{
author = "Đurić, Zoran and Dankovic, Tatjana and Jakšić, Zoran and Randjelović, Danijela and Petrovic, Radomir and Wolfgang, Ehrfeld and Schmidt, Andreas and Hecker, Klaus",
year = "1999",
abstract = "Abstract
In this paper we propose a silicon UV flame detector for combustion systems. In gas burners the relative intensity of flame radiation is dominant in the ultraviolet region (below 0.35 μm). In the visible and infrared regions the relative intensity of radiation of the incandescent surfaces (black body) is several orders of magnitude greater than the gas flame radiation intensity. Therefore it is required that the flame detector has a much greater sensitivity in the ultraviolet region. The proposed detector is formed on n-type silicon on isolator wafer. In order to suppress sensitivity in the visible and the IR regions, the absorption region of the detector is greatly reduced, and a UV filter utilizing photonic crystal is designed. The p-n junctions are formed by very shallow diffusion of impurities. The contacts are made after the deposition of a thin oxide layer. The UV filter is then sputtered on the detector surface. The filter consists of a thin silver film (protected by MgF2), and a one-dimensional photonic crystal made of twelve pairs of NaF/Y2O3 layers. The photonic band gaps of the crystal should suppress the propagation of the light with wavelengths greater than 0.35 μm. For the detector active area of 5 mm2, the thickness of the silver layer of 0.13 μm and a dark current of 1 nA, the noise equivalent power at 0.32 μm is 4.23·10-13W/Hz1/2. The calculated flame signal to total signal ratio is 0.52.",
publisher = "Society of Photo-Optical Instrumentation Engineers",
journal = "Proceedings of SPIE - The International Society for Optical Engineering, Proceedings of the 1999 Design, Test, and Microfabrication of MEMS and MOEMS",
title = "Silicon UV flame detector utilizing photonic crystal",
volume = "3680",
number = "II",
pages = "601-610",
doi = "10.1117/12.341251"
}

Đurić, Z., Dankovic, T., Jakšić, Z., Randjelović, D., Petrovic, R., Wolfgang, E., Schmidt, A.,& Hecker, K.. (1999). Silicon UV flame detector utilizing photonic crystal. in Proceedings of SPIE - The International Society for Optical Engineering, Proceedings of the 1999 Design, Test, and Microfabrication of MEMS and MOEMS
Society of Photo-Optical Instrumentation Engineers., 3680(II), 601-610.
https://doi.org/10.1117/12.341251

Đurić Z, Dankovic T, Jakšić Z, Randjelović D, Petrovic R, Wolfgang E, Schmidt A, Hecker K. Silicon UV flame detector utilizing photonic crystal. in Proceedings of SPIE - The International Society for Optical Engineering, Proceedings of the 1999 Design, Test, and Microfabrication of MEMS and MOEMS. 1999;3680(II):601-610.
doi:10.1117/12.341251 .

Đurić, Zoran, Dankovic, Tatjana, Jakšić, Zoran, Randjelović, Danijela, Petrovic, Radomir, Wolfgang, Ehrfeld, Schmidt, Andreas, Hecker, Klaus, "Silicon UV flame detector utilizing photonic crystal" in Proceedings of SPIE - The International Society for Optical Engineering, Proceedings of the 1999 Design, Test, and Microfabrication of MEMS and MOEMS, 3680, no. II (1999):601-610,
https://doi.org/10.1117/12.341251 . .