TY  - JOUR
AU  - Petropoulos, Anastasios
AU  - Kaltsas, Grigoris
AU  - Randjelović, Danijela
AU  - Gogolides, Evangelos
PY  - 2010
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/653
AB  - In this work a micro-flow sensor integrated in the bottom surface of a rectangular microchannel is used in order to evaluate simultaneously both the flow velocity and the pressure in various micro-flow conditions. In this way direct flow rate measurement is achieved while real-time monitoring of the corresponding flow and pressure values are obtained. The effect of the microchannel dimensions in the flow determination is also studied. An almost linear relation of Delta P/L with respect to Re was extracted, which indicates a laminar flow behavior. The friction factor, corresponding to the specific microchannel dimensions was calculated together with the f.Re value.
PB  - Elsevier
T2  - Microelectronic Engineering
T1  - Study of flow and pressure field in microchannels with various cross-section areas
VL  - 87
IS  - 5-8
SP  - 827
EP  - 829
DO  - 10.1016/j.mee.2009.10.025
ER  - 

@article{
author = "Petropoulos, Anastasios and Kaltsas, Grigoris and Randjelović, Danijela and Gogolides, Evangelos",
year = "2010",
abstract = "In this work a micro-flow sensor integrated in the bottom surface of a rectangular microchannel is used in order to evaluate simultaneously both the flow velocity and the pressure in various micro-flow conditions. In this way direct flow rate measurement is achieved while real-time monitoring of the corresponding flow and pressure values are obtained. The effect of the microchannel dimensions in the flow determination is also studied. An almost linear relation of Delta P/L with respect to Re was extracted, which indicates a laminar flow behavior. The friction factor, corresponding to the specific microchannel dimensions was calculated together with the f.Re value.",
publisher = "Elsevier",
journal = "Microelectronic Engineering",
title = "Study of flow and pressure field in microchannels with various cross-section areas",
volume = "87",
number = "5-8",
pages = "827-829",
doi = "10.1016/j.mee.2009.10.025"
}

Petropoulos, A., Kaltsas, G., Randjelović, D.,& Gogolides, E.. (2010). Study of flow and pressure field in microchannels with various cross-section areas. in Microelectronic Engineering
Elsevier., 87(5-8), 827-829.
https://doi.org/10.1016/j.mee.2009.10.025

Petropoulos A, Kaltsas G, Randjelović D, Gogolides E. Study of flow and pressure field in microchannels with various cross-section areas. in Microelectronic Engineering. 2010;87(5-8):827-829.
doi:10.1016/j.mee.2009.10.025 .

Petropoulos, Anastasios, Kaltsas, Grigoris, Randjelović, Danijela, Gogolides, Evangelos, "Study of flow and pressure field in microchannels with various cross-section areas" in Microelectronic Engineering, 87, no. 5-8 (2010):827-829,
https://doi.org/10.1016/j.mee.2009.10.025 . .

TY  - JOUR
AU  - Randjelović, Danijela
AU  - Đurić, Zoran G.
AU  - Petropoulos, Anastasios
AU  - Kaltsas, Grigoris
AU  - Lazić, Žarko
AU  - Popović, Mirjana
PY  - 2009
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/536
AB  - A novel, simple approach for analytical modelling of thermal flow sensors has been implemented. It is based on unification of results obtained using the already developed two-zone analytical model and theory of laminar fluid flow over uniformly heated plate. This model can be used in order to extract the main parameters for various geometrical configurations of thermal flow sensors. Presented analytical model was further verified by experimental results. Flow tests were performed using multipurpose MEMS flow sensors consisting of two thermopiles, with 30 p(+)Si/Al thermocouples each, and a "U" shaped p(+)Si heater. Thermally isolating membrane was formed of sputtered SiO(2) and residual n-Si layer. Experimental evaluation was performed under various flow conditions and applied heating power values. The results showed excellent agreement with theoretical predictions.
PB  - Elsevier
T2  - Microelectronic Engineering
T1  - Analytical modelling of thermopile based flow sensor and verification with experimental results
VL  - 86
IS  - 4-6
SP  - 1293
EP  - 1296
DO  - 10.1016/j.mee.2008.12.004
ER  - 

@article{
author = "Randjelović, Danijela and Đurić, Zoran G. and Petropoulos, Anastasios and Kaltsas, Grigoris and Lazić, Žarko and Popović, Mirjana",
year = "2009",
abstract = "A novel, simple approach for analytical modelling of thermal flow sensors has been implemented. It is based on unification of results obtained using the already developed two-zone analytical model and theory of laminar fluid flow over uniformly heated plate. This model can be used in order to extract the main parameters for various geometrical configurations of thermal flow sensors. Presented analytical model was further verified by experimental results. Flow tests were performed using multipurpose MEMS flow sensors consisting of two thermopiles, with 30 p(+)Si/Al thermocouples each, and a "U" shaped p(+)Si heater. Thermally isolating membrane was formed of sputtered SiO(2) and residual n-Si layer. Experimental evaluation was performed under various flow conditions and applied heating power values. The results showed excellent agreement with theoretical predictions.",
publisher = "Elsevier",
journal = "Microelectronic Engineering",
title = "Analytical modelling of thermopile based flow sensor and verification with experimental results",
volume = "86",
number = "4-6",
pages = "1293-1296",
doi = "10.1016/j.mee.2008.12.004"
}

Randjelović, D., Đurić, Z. G., Petropoulos, A., Kaltsas, G., Lazić, Ž.,& Popović, M.. (2009). Analytical modelling of thermopile based flow sensor and verification with experimental results. in Microelectronic Engineering
Elsevier., 86(4-6), 1293-1296.
https://doi.org/10.1016/j.mee.2008.12.004

Randjelović D, Đurić ZG, Petropoulos A, Kaltsas G, Lazić Ž, Popović M. Analytical modelling of thermopile based flow sensor and verification with experimental results. in Microelectronic Engineering. 2009;86(4-6):1293-1296.
doi:10.1016/j.mee.2008.12.004 .

Randjelović, Danijela, Đurić, Zoran G., Petropoulos, Anastasios, Kaltsas, Grigoris, Lazić, Žarko, Popović, Mirjana, "Analytical modelling of thermopile based flow sensor and verification with experimental results" in Microelectronic Engineering, 86, no. 4-6 (2009):1293-1296,
https://doi.org/10.1016/j.mee.2008.12.004 . .

TY  - JOUR
AU  - Randjelović, Danijela
AU  - Petropoulos, Anastasios
AU  - Kaltsas, Grigoris
AU  - Stojanovic, Milos
AU  - Lazić, Žarko
AU  - Đurić, Zoran G.
AU  - Matic, Milan
PY  - 2008
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/401
AB  - This paper presents design, fabrication and experimental results of multipurpose thermopile based sensor which is compatible with technological processes already developed at IHTM-IMTM for fabrication of pressure sensors. Thermal isolation is assured using back etching of bulk silicon. Thermopiles have multilayer structure and sandwich membrane consists of layer of residual n-Si and sputtered oxide. Post-etching technique was developed and functional structures with membranes below 3 mu m were fabricated. Steady state and transient behaviour of fabricated structures were anticipated by applying two-zone 1D analytical model and FEA Comsol simulation. Sensors were tested as ac-dc transfer devices, gas flow meters and vacuum detectors.
PB  - Elsevier Science Sa, Lausanne
T2  - Sensors and Actuators, A: Physical
T1  - Multipurpose MEMS thermal sensor based on thermopiles
VL  - 141
IS  - 2
SP  - 404
EP  - 413
DO  - 10.1016/j.sna.2007.10.043
ER  - 

@article{
author = "Randjelović, Danijela and Petropoulos, Anastasios and Kaltsas, Grigoris and Stojanovic, Milos and Lazić, Žarko and Đurić, Zoran G. and Matic, Milan",
year = "2008",
abstract = "This paper presents design, fabrication and experimental results of multipurpose thermopile based sensor which is compatible with technological processes already developed at IHTM-IMTM for fabrication of pressure sensors. Thermal isolation is assured using back etching of bulk silicon. Thermopiles have multilayer structure and sandwich membrane consists of layer of residual n-Si and sputtered oxide. Post-etching technique was developed and functional structures with membranes below 3 mu m were fabricated. Steady state and transient behaviour of fabricated structures were anticipated by applying two-zone 1D analytical model and FEA Comsol simulation. Sensors were tested as ac-dc transfer devices, gas flow meters and vacuum detectors.",
publisher = "Elsevier Science Sa, Lausanne",
journal = "Sensors and Actuators, A: Physical",
title = "Multipurpose MEMS thermal sensor based on thermopiles",
volume = "141",
number = "2",
pages = "404-413",
doi = "10.1016/j.sna.2007.10.043"
}

Randjelović, D., Petropoulos, A., Kaltsas, G., Stojanovic, M., Lazić, Ž., Đurić, Z. G.,& Matic, M.. (2008). Multipurpose MEMS thermal sensor based on thermopiles. in Sensors and Actuators, A: Physical
Elsevier Science Sa, Lausanne., 141(2), 404-413.
https://doi.org/10.1016/j.sna.2007.10.043

Randjelović D, Petropoulos A, Kaltsas G, Stojanovic M, Lazić Ž, Đurić ZG, Matic M. Multipurpose MEMS thermal sensor based on thermopiles. in Sensors and Actuators, A: Physical. 2008;141(2):404-413.
doi:10.1016/j.sna.2007.10.043 .

Randjelović, Danijela, Petropoulos, Anastasios, Kaltsas, Grigoris, Stojanovic, Milos, Lazić, Žarko, Đurić, Zoran G., Matic, Milan, "Multipurpose MEMS thermal sensor based on thermopiles" in Sensors and Actuators, A: Physical, 141, no. 2 (2008):404-413,
https://doi.org/10.1016/j.sna.2007.10.043 . .

TY  - CONF
AU  - Randjelović, Danijela
AU  - Kaltsas, Grigoris
AU  - Lazić, Žarko
AU  - Popović, Mirjana
PY  - 2002
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/7059
AB  - This paper reports a multipurpose thermal sensor based on the Seebeck effect. The sensor has thermocouples with a multilayer structure consisting of one thermocouple strip laying on the insulating membrane and the other one under the first thermoelement and the membrane. The vertical arrangement allows a greater number of thermocouples to be placed on a given chip area. Central and lateral thermistors are placed near hot and cold thermocouple junctions, respectively, and serve for determination of the temperature difference established on the chip. Experimental results confirm that the same structure could be used as a thermal converter and a gas flow meter.
PB  - Institute of Electrical and Electronics Engineers Inc (IEEE)
C3  - Proceedings - 23rd International Conference on Microelectronics, MIEL 2002
T1  - Multipurpose thermal sensor based on Seebeck effect
VL  - 1
SP  - 261
EP  - 264
DO  - 10.1109/MIEL.2002.1003189
ER  - 

@conference{
author = "Randjelović, Danijela and Kaltsas, Grigoris and Lazić, Žarko and Popović, Mirjana",
year = "2002",
abstract = "This paper reports a multipurpose thermal sensor based on the Seebeck effect. The sensor has thermocouples with a multilayer structure consisting of one thermocouple strip laying on the insulating membrane and the other one under the first thermoelement and the membrane. The vertical arrangement allows a greater number of thermocouples to be placed on a given chip area. Central and lateral thermistors are placed near hot and cold thermocouple junctions, respectively, and serve for determination of the temperature difference established on the chip. Experimental results confirm that the same structure could be used as a thermal converter and a gas flow meter.",
publisher = "Institute of Electrical and Electronics Engineers Inc (IEEE)",
journal = "Proceedings - 23rd International Conference on Microelectronics, MIEL 2002",
title = "Multipurpose thermal sensor based on Seebeck effect",
volume = "1",
pages = "261-264",
doi = "10.1109/MIEL.2002.1003189"
}

Randjelović, D., Kaltsas, G., Lazić, Ž.,& Popović, M.. (2002). Multipurpose thermal sensor based on Seebeck effect. in Proceedings - 23rd International Conference on Microelectronics, MIEL 2002
Institute of Electrical and Electronics Engineers Inc (IEEE)., 1, 261-264.
https://doi.org/10.1109/MIEL.2002.1003189

Randjelović D, Kaltsas G, Lazić Ž, Popović M. Multipurpose thermal sensor based on Seebeck effect. in Proceedings - 23rd International Conference on Microelectronics, MIEL 2002. 2002;1:261-264.
doi:10.1109/MIEL.2002.1003189 .

Randjelović, Danijela, Kaltsas, Grigoris, Lazić, Žarko, Popović, Mirjana, "Multipurpose thermal sensor based on Seebeck effect" in Proceedings - 23rd International Conference on Microelectronics, MIEL 2002, 1 (2002):261-264,
https://doi.org/10.1109/MIEL.2002.1003189 . .