@conference{
author = "Lazić, Žarko and Smiljanić, Milče M. and Nešić, Dušan and Zeković, Ljubiša",
year = "2022",
abstract = "In this paper, two color detector based on silicon
photodiodes is studied and fabricated. Standard IHTM
photodiode’s design is modified to allow mounting one
photodiode above another using special micromachined carrier.
The carrier is fabricated using wet silicon etching in 25% TMAH
water solution and anodic bonding of etched silicon and Pyrex
glass. The fabricated carrier also allows easy wire
thermocompression bonding from the photodiode’s pads to TO-5
housing. Output currents of the photodiodes were measured by
applying light of 900 nm and 1060 nm. Obtained results verify
applicability of the new packaging for two color detector.",
publisher = "Belgrade : ETRAN Society",
journal = "Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia",
title = "Two Color Photodiodes Mounted on the Micromachined Carrier",
pages = "391-394",
url = "https://hdl.handle.net/21.15107/rcub_cer_5640"
}